MEMS Technology
Welcome to MEMS Technology course webpage
This course introduces students to MEMS technology. These are the small devices having promising applications by enabling the design of smart and high precision sensors, actuators and transducers. In the last few decades lot of efforts were devoted, worldwide in research and development in this area. Now the art of MEMS device fabrication has been mastered. This led to industrial production of these devices. Today these devices have made inroads in everyone's life without being noticed.
The course aims at imparting you the sound fundamentals of the course. The course will enable you not only to conceptualize new devices, but also design them using various MEMS software. The course has three major thrusts.
a) MEMS device physics
b) Fabrication of MEMS
c) Design of MEMS device
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