Nature (under revision)

Monolithic three-dimensional integration for advanced packaging

Luhing Hu†, Doyoon Lee†, Tathagata Srimani†, Gauthaman Murali†, Minsu Seol, June-Chul Shin, Sang-Hoon Bae, Dennis Rich, Srabanti Chowdhury, Hyeong-Seok Jang, Jekyung Kim, Vincent Tung, Ki Seok Kim*, Subhasish Mitra*, Sung Kyu Lim*, Sang Won Kim*, Jeehwan Kim* 

Advanced Materials 37 (34), 2418582 (2025)

Artificial Optoelectronic Synapse Featuring Bidirectional Post-Synaptic Current for Compact and Energy-Efficient Neural Hardware

Hogeun Ahn, Yena Kim, Seunghwan Seo, Junseo Lee, Sehee Lee, Saeyoung Oh, Byeongchan Kim, Jeongwon Park, Sumin Kang, Yuseok Kim, Ayoung Ham, Jaehyun Lee, Donggeon Park, Seongdae Kwon, Doyoon Lee, Jung-El Ryu, June-Chul Shin, Atharva Sahasrabudhe, Ki Seok Kim, Sang-Hoon Bae, Kibum Kang, Jeehwan Kim, Saeroonter Oh, Jin-Hong Park*

Nature Nanotechnology 19 (7), 895-906 (2024)

The future of two-dimensional semiconductors beyond Moore’s law

Ki Seok Kim†, Junyoung Kwon†, Huije Ryu†, Changhyun Kim†, Hyunseok Kim†, Eun-Kyu Lee, Doyoon Lee, Seunghwan Seo, Ne Myo Han, Jun Min Suh, Jekyung Kim, Min-Kyu Song, Sangho Lee, Minsu Seol*, Jeehwan Kim*

Advanced Materials 36 (24), 2310015 (2024)

Junctionless Negative-Differential-Resistance Device Using 2D Van-Der-Waals Layered Materials for Ternary Parallel Computing

Taeran Lee, Kil-Su Jung, Seunghwan Seo, Junseo Lee, Jihye Park, Sumin Kang, Jeongwon Park, Juncheol Kang, Hogeun Ahn, Suhyun Kim, Hae Won Lee, Doyoon Lee, Ki Seok Kim, Hyunseok Kim, Keun Heo, Sunmean Kim, Sang-Hoon Bae, Seokhyeong Kang, Kibum Kang, Jeehwan Kim, Jin-Hong Park*

Nature Electronics 7 (6), 416-418 (2024)

2D materials can unlock single-crystal-based monolithic 3D integration

Kuangye Lu, Jaewoo Shim, Ki Seok Kim*, Sang Won Kim*, Jeehwan Kim*

Science Advances 9 (42), eadj5379 (2023)

Remote epitaxial interaction through graphene

Celesta S Chang†, Ki Seok Kim†, Bo-In Park†, Joonghoon Choi†, Hyunseok Kim, Junseok Jeong, Matthew Barone, Nicholas Parker, Sangho Lee, Xinyuan Zhang, Kuangye Lu, Jun Min Suh, Jekyung Kim, Doyoon Lee, Ne Myo Han, Mingi Moon, Yun Seog Lee, Dong-Hwan Kim, Darrell G Schlom, Young Joon Hong*, Jeehwan Kim*

Nature Nanotechnology 18 (5), 464-470 (2023)

High-throughput manufacturing of epitaxial membranes from a single wafer by 2D materials-based layer transfer process

Hyunseok Kim†, Yunpeng Liu†, Kuangye Lu†, Celesta S Chang†, Dongchul Sung, Marx Akl, Kuan Qiao, Ki Seok Kim, Bo-In Park, Menglin Zhu, Jun Min Suh, Jekyung Kim, Junseok Jeong, Yongmin Baek, You Jin Ji, Sungsu Kang, Sangho Lee, Ne Myo Han, Chansoo Kim, Chanyeol Choi, Xinyuan Zhang, Hyeong-Kyu Choi, Yanming Zhang, Haozhe Wang, Lingping Kong, Nordin Noor Afeefah, Mohamed Nainar Mohamed Ansari, Jungwon Park, Kyusang Lee, Geun Young Yeom, Sungkyu Kim, Jinwoo Hwang, Jing Kong, Sang-Hoon Bae, Yunfeng Shi, Suklyun Hong, Wei Kong, Jeehwan Kim*

Nature Nanotechnology 17 (10), 1054-1059 (2022)

Graphene nanopattern as a universal epitaxy platform for single-crystal membrane production and defect reduction

Hyunseok Kim†, Sangho Lee†, Jiho Shin†, Menglin Zhu, Marx Akl, Kuangye Lu, Ne Myo Han, Yongmin Baek, Celesta S Chang, Jun Min Suh, Ki Seok Kim, Bo-In Park, Yanming Zhang, Chanyeol Choi, Heechang Shin, He Yu, Yuan Meng, Seung-Il Kim, Seungju Seo, Kyusang Lee, Hyun S Kum, Jae-Hyun Lee, Jong-Hyun Ahn, Sang-Hoon Bae, Jinwoo Hwang, Yunfeng Shi, Jeehwan Kim*

Surfaces and Interfaces 33, 102219 (2022)

Low temperature silicon nitride grown by very high frequency (VHF, 162MHz) plasma enhanced atomic layer deposition with floating multi-tile electrode

You Jin Ji, Hae In Kim, Ki Hyun Kim, Ji Eun Kang, Doo San Kim, Ki Seok Kim, AR Ellingboe, Dong Woo Kim, Geun Young Yeom*

Advanced Materials 34 (36), 2202799 (2022)

A Van Der Waals reconfigurable multi‐valued logic device and circuit based on tunable negative‐differential‐resistance phenomenon

Seunghwan Seo†, Jeong-Ick Cho†, Kil-Su Jung†, Maksim Andreev, Ju-Hee Lee, Hogeun Ahn, Sooyoung Jung, Taeran Lee, Byeongchan Kim, Seojoo Lee, Juncheol Kang, Kyeong-Bae Lee, Ho-Jun Lee, Ki Seok Kim, Geun Young Yeom, Keun Heo, Jin-Hong Park*

ACS Applied Electronic Materials 4 (8), 3794-3800 (2022)

Atomic Layer Engineering of TMDs by Modulation of Top Chalcogen Atoms: For Electrical Contact and Chemical Doping

Ki Seok Kim†, Ki Hyun Kim†, Ji Eun Kang, Ju-Hee Lee, You Jin Ji, Geun Young Yeom*

Scientific Reports 12 (1), 5703 (2022)

Selective etching of silicon nitride over silicon oxide using ClF₃/H₂ remote plasma

Won Oh Lee†, Ki Hyun Kim†, Doo San Kim, You Jin Ji, Ji Eun Kang, Hyun Woo Tak, Jin Woo Park, Han Dock Song, Ki Seok Kim, Byeong Ok Cho, Young Lae Kim, Geun Young Yeom**

APL Materials 10 (4) (2022)

Atomic layer-by-layer etching of graphene directly grown on SrTiO₃ substrates for high-yield remote epitaxy and lift-off

Ki Seok Kim†, Ji Eun Kang†, Peng Chen†, Sungkyu Kim, Jongho Ji, Geun Young Yeom*, Jeehwan Kim*, Hyun S Kum*

Micromachines 13 (2), 173 (2022)

Deposition of Very-Low-Hydrogen-Containing Silicon at a Low Temperature Using Very-High-Frequency (162 MHz) SiH4 Plasma

Ki Seok Kim, You-Jin Ji, Ki-Hyun Kim, Ji-Eun Kang, Albert Rogers Ellingboe, Geun Young Yeom*

Advanced Materials 33 (40), 2102980 (2021)

An optogenetics‐inspired flexible van der Waals optoelectronic synapse and its application to a convolutional neural network

Seunghwan Seo, Je-Jun Lee, Ryong-Gyu Lee, Tae Hyung Kim, Sangyong Park, Sooyoung Jung, Hyun‐Kyu Lee, Maksim Andreev, Kyeong‐Bae Lee, Kil-Su Jung, Seyong Oh, Ho-Jun Lee, Ki Seok Kim, Geun Young Yeom, Yong-Hoon Kim, Jin-Hong Park*

ACS nano 15 (6), 10587-10596 (2021)

Impact of 2D–3D heterointerface on remote epitaxial interaction through graphene

Hyunseok Kim, Kuangye Lu, Yunpeng Liu, Hyun S Kum, Ki Seok Kim, Kuan Qiao, Sang-Hoon Bae, Sangho Lee, You Jin Ji, Ki Hyun Kim, Hanjong Paik, Saien Xie, Heechang Shin, Chanyeol Choi, June Hyuk Lee, Chengye Dong, Joshua A Robinson, Jae-Hyun Lee, Jong-Hyun Ahn, Geun Young Yeom, Darrell G Schlom, Jeehwan Kim*

Applied Surface Science 541, 148313 (2021)

Silicon nitride deposited by laser assisted plasma enhanced chemical vapor deposition for next generation organic electronic devices

Ki Hyun Kim†, Ki Seok Kim†, You Jin Ji, Ji Eun Kang, Geun Young Yeom*

Nanotechnology 32 (7), 075706 (2021)

Characteristics of silicon nitride deposited by very high frequency (162 MHz)-plasma enhanced atomic layer deposition using bis (diethylamino) silane

Ji Young Byun, You Jin Ji, Ki Hyun Kim, Ki Seok Kim, Hyun Woo Tak, Albert Rogers Ellingboe, Geun Young Yeom*

Advanced Science 7 (19), 2000991 (2020)

Double negative differential resistance device based on hafnium disulfide/pentacene hybrid structure

Kil-Su Jung†, Keun Heo†, Min-Je Kim, Maksim Andreev, Seunghwan Seo, Jin-Ok Kim, Ji-Hye Lim, Kwan-Ho Kim, Sungho Kim, Ki Seok Kim, Geun Yong Yeom, Jeong Ho Cho, Jin-Hong Park*

Applied Surface Science 506, 144904 (2020)

Nitriding process for next-generation semiconductor devices by VHF (162 MHz) multi-tile push-pull plasma source

You Jin Ji†, Ki Seok Kim†, Ki Hyun Kim, Albert Rogers Ellingboe, Geun Young Yeom*

Small 16 (6), 1905000 (2020)

Wafer-Scale and Low-Temperature Growth of 1T-WS2 Film for Efficient and Stable Hydrogen Evolution Reaction

Hyeong-U Kim, Vinit Kanade, Mansu Kim, Ki Seok Kim, Byeong-Seon An, Hyunho Seok, Hocheon Yoo, Lindsay E Chaney, Seung-Il Kim, Cheol-Woong Yang, Geun Yong Yeom, Dongmok Whang, Jae-Hyun Lee, Taesung Kim*

Journal of Materials Chemistry C 8 (5), 1846-1851 (2020)

Effect of large work function modulation of MoS2 by controllable chlorine doping using a remote plasma

Ki Hyun Kim, Ki Seok Kim, You Jin Ji, Inyong Moon, Keun Heo, Dong-Ho Kang, Kyong Nam Kim, Won Jong Yoo, Jin-Hong Park, Geun Young Yeom*

Nature communications 10 (1), 4701 (2019)

Ultrasensitive MoS2 photodetector by serial nano-bridge multi-heterojunction

Ki Seok Kim†, You Jin Ji†, Ki Hyun Kim, Seunghyuk Choi, Dong-Ho Kang, Keun Heo, Seongjae Cho, Soonmin Yim, Sungjoo Lee, Jin-Hong Park, Yeon Sik Jung, Geun Young Yeom*

Applied Science and Convergence Technology 28 (5), 142-147 (2019)

A brief review of plasma enhanced atomic layer deposition of Si₃N₄

You Jin Ji, Ki Seok Kim, Ki Hyun Kim, Ji Young Byun, Geun Young Yeom*

Applied Surface Science 470, 129-134 (2019)

Low-temperature wafer-scale growth of MoS₂-graphene heterostructures

Hyeong-U Kim, Mansu Kim, Yinhua Jin, Yuhwan Hyeon, Ki Seok Kim, Byeong-Seon An, Cheol-Woong Yang, Vinit Kanade, Ji-Yun Moon, Geun Yong Yeom, Dongmok Whang, Jae-Hyun Lee, Taesung Kim*

ACS applied materials & interfaces 11 (12), 11061-11105 (2019)

Flexible Molybdenum Disulfide (MoS2) Atomic Layers for Wearable Electronics and Optoelectronics

Eric Singh, Pragya Singh, Ki Seok Kim, Geun Young Yeom*, Hari Singh Nalwa*

Electrochemical Society Transactions aimes2018 86 (6), 69-74 (2018)

Layer Control of 2D-MoS2 by Atomic Layer Etching and Its Device Characteristics

Ki Seok Kim, Ki Hyun Kim, You Jin Ji, Geun Young Yeom*

RSC advances 8 (69), 39749-39755 (2018)

Hierarchical nanostructures of nitrogen-doped molybdenum sulphide for supercapacitors

Chaitanya Kanade, Sudhir Arbuj, Kaluram Kanade, Ki Seok Kim, Geun Young Yeom, Taesung Kim, Bharat Kale*

Scientific reports 7 (1), 13585 (2017)

Silicon nitride deposition for flexible organic electronic devices by VHF (162 MHz)-PECVD using a multi-tile push-pull plasma source

Ki Seok Kim†, Ki Hyun Kim†, You Jin Ji, Jin Woo Park, Jae Hee Shin, Albert Rogers Ellingboe, Geun Young Yeom*

Journal of Physics D: Applied Physics 50 (25), 254007 (2017)

Atomic layer etching of InGaAs by controlled ion beam

Jin Woo Park, Doo San Kim, Mu Kyeom Mun, Won Oh Lee, Ki Seok Kim, Geun Young Yeom*

Scientific Reports 7 (1), 2462 (2017)

Atomic layer etching of graphene through controlled ion beam for graphene-based electronics

Ki Seok Kim, You Jin Ji, Yeonsig Nam, Ki Hyun Kim, Eric Singh, Jin Yong Lee, Geun Young Yeom*

Nanotechnology 28 (17), 175601 (2017)

Highly uniform wafer-scale synthesis of α-MoO3 by plasma enhanced chemical vapor deposition

Hyeong-U Kim, Juhyun Son, Atul Kulkarni, Chisung Ahn, Ki Seok Kim, Dongjoo Shin, Geun Yong Yeom, Taesung Kim*

ACS applied materials & interfaces 9 (13), 11967-11976 (2017)

Atomic Layer Etching Mechanism of MoS2 for Nanodevices

Ki Seok Kim, Ki Hyun Kim, Yeonsig Nam, Jaeho Jeon, Soonmin Yim, Eric Singh, Jin Yong Lee, Sung Joo Lee, Yeon Sik Jung, Geun Young Yeom*, Dong Woo Kim*

ACS applied materials & interfaces 9 (4), 3223-3245 (2017)

Atomically Thin-Layered Molybdenum Disulfide (MoS2) for Bulk-Heterojunction Solar Cells

Eric Singh, Ki Seok Kim, Geun Young Yeom*, Hari Singh Nalwa*

Journal of Materials Chemistry C 5 (41), 10888-10893 (2017)

Layer-controlled thinning of black phosphorus by an Ar ion beam

Jin Woo Park†, Sung Kyu Jang†, Dong Ho Kang, Doo San Kim, Min Hwan Jeon, Won Oh Lee, Ki Seok Kim, Sung Joo Lee, Jin-Hong Park, Kyong Nam Kim, Geun Young Yeom*

RSC advances 7 (45), 28234-28290 (2017)

Two-dimensional transition metal dichalcogenide-based counter electrodes for dye-sensitized solar cells

Eric Singh, Ki Seok Kim, Geun Young Yeom*, Hari Singh Nalwa*

Journal of Physics D: Applied Physics 49 (39), 395201 (2016)

Characteristics of silicon nitride deposited by VHF (162 MHz)-plasma enhanced chemical vapor deposition using a multi-tile push–pull plasma source

Ki Seok Kim, Nishant Sirse, Ki Hyun Kim, Albert Rogers Ellingboe, Kyong Nam Kim, Geun Young Yeom*

Carbon 104, 119-124 (2016)

Surface treatment process applicable to next generation graphene-based electronics

Ki Seok Kim, Hyo-Ki Hong, Hanearl Jung, Il-Kwon Oh, Zonghoon Lee, Hyungjun Kim, Geun Young Yeom*, Kyong Nam Kim*

Applied Physics Letters 108 (21) (2016)

Atomic layer deposition of HfO2 on graphene through controlled ion beam treatment

Ki Seok Kim, Il-Kwon Oh, Hanearl Jung, Hyungjun Kim, Geun Young Yeom*, Kyong Nam Kim*

Science of Advanced Materials 8 (4), 884-890 (2016)

Low energy BCl₃ plasma doping of few-layer graphene

Viet Phuong Pham, Doo San Kim, Ki Seok Kim, Jin Woo Park, Kyung Chae Yang, Se Han Lee, Geun Young Yeom*, Kyong Nam Kim*

Japanese Journal of Applied Physics 54 (1S), 01AA10 (2015)

Characteristics of pulsed dual frequency inductively coupled plasma

Jin Seok Seo, Kyoung Nam Kim, Ki Seok Kim, Tae Hyung Kim, Geun Young Yeom*

Journal of nanoscience and nanotechnology 14 (12), 9108-9113 (2014)

Graphene treatment using a very low energy Ar+ ion beam for residue removal

Kyoung Seok Min, Ki Seok Kim, Kyoung Nam Kim, Anurag Mishra, Geun Young Yeom*

Nanoscale 6 (24), 15301-15308 (2014)

Cyclic chlorine trap-doping for transparent, conductive, thermally stable and damage-free graphene

Viet Phuong Pham†, Kyong Nam Kim†, Min Hwan Jeon, Ki Seok Kim, Geun Young Yeom*

Journal of Nanoscience and Nanotechnology 13 (12), 8064-8069 (2013)

Enhanced light extraction from GaN-based vertical light-emitting diodes with a nano-roughened N-GaN surface using dual-etch

Tae Hyung Kim, Kyong Nam Kim, Jin Seok Seo, Ki Seok Kim, Jeong Oun Bae, Geun Young Yeom*

Journal of Nanoscience and Nanotechnology 13 (12), 8106-8109 (2013)

Formation of Gallium Vacancies and Their Effects on the Nanostructure of Pd/Ir/Au Ohmic Contact to p-Type GaN

Kyong Nam Kim, Tae Hyung Kim, Jin Seok Seo, Ki Seok Kim, Jeong Woon Bae, Geun Young Yeom*

PATENT

US Patent App. 18/382,209 (2024)

Method of manufacturing electronic device using cyclic doping process, and electronic device manufactured by the same

Geun Young Yeom, Ki Hyun Kim, Ji Eun Kang, Seong Jae Yu, You Jin JI, Doo San KIM, Hyun Woo Tak, Yun Jong JANG, Hee Ju Kim, Ki Seok Kim

US Patent App. 2024/0071759 

Confined growth of 2D materials and their heterostructures

Jeehwan Kim, Kiseok Kim, Sanghoon Bae

PCT/US2024/015324 

Low-temperature single-crystal 2D materials growth using trench patterns

Jeehwan Kim, Kiseok Kim, Doyoon Lee

US Patent 11,424,375 (2022)

Photoelectronic device, photodiode, and phototransistor

Geun Young Yeom, Ki Seok Kim, Ki Hyun Kim, You Jin JI, Ji Young Byun

US Patent 11,127,570 (2021)

Plasma source and plasma generation apparatus using the same

Geun Young Yeom, Ki Hyun Kim, Ki Seok Kim, You Jin JI, Jin Woo Park, Doo San KIM, Won Oh Lee, Chang Hoon SONG, Ji Young Byun, Ji Soo OH, Hyun Woo Tak

US Patent 11,120,975 (2021)

Ion beam etching apparatus

Geun Young Yeom, Jin Woo Park, Doo San KIM, Jong Sik OH, Da In SUNG, You Jin JI, Won Oh Lee, Mu Kyeom MUN, Kyung Chae YANG, Ki Seok Kim, Ji Soo OH, Ki Hyun Kim

US Patent 10,916,670 (2021)

Semiconductor device, photoelectronic device, and method for manufacturing transition-metal dichalcogenide thin film

Geun Young Yeom, Ki Seok Kim, Ki Hyun Kim, Jin Woo Park, Doo San KIM, You Jin JI, Ji Young Byun, Jieun Kang

US Patent 10,593,819 (2020)

Semiconductor device, photoelectronic device, and method for manufacturing transition-metal dichalcogenide thin film

Geun Young Yeom, Ki Seok Kim, Ki Hyun Kim, Jin Woo Park, Doo San KIM, You Jin JI, Ji Young Byun

US Patent App. 15/498,680 (2017)

Method of etching atomic layer

YEOM Geunyoung, Kyong Nam KIM, Ki Seok Kim, Mu Kyeom MUN, Jinwoo Park, YUN Deokhyeon, Jo-won Lee