CVD Furnace
Andy Group , Since 2003
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A Leading Supplier
In Advanced High Thermal Material And Equipment with high quality !
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Furnace Features
CVD Furnace Specification
MAX TEMPERATURE: 1000℃/ 1200℃ /1300℃/ 1400℃ /1500℃/ 1600℃/1700℃/1800℃
NORMAL VACUUM: -0.1MPa
MAX VACUUM: Configuration Molecular Pump, Vacuum 7×10-4 Pa (Optional)
FLANGE: 304 Stainless Steel Sealing Flange
OVER-TEMPERATURE PROTECTION: Automatic Power-off When The Temperature Exceeds The Allowable Set Value
SAFETY PROTECTION: Automatically Power Off When The Furnace Body Leaks
FURNACE STRUCTURE: Double Layer Steel Dual Cooling Fan, Surface Temperature Below 50℃
MAX HEATING RATE: 20°C /min
TEMPERATURE ACCURACY: ±1℃
TEMPERATURE UNIFORMITY: ±5℃
TEMPERATURE CONTROL: 50 Segments Programmable And Auto Control
APPLICATION: CVD Testing
High-quality MoSi2 or SiC or FeCrAl heating element according to temperature different imported Japan ,Europe, USA
Ceramic fiber chamber imported from Japan ,Europe.
30-51 segments programmable and PID auto control
With over-temperature alarm function
Double layer of furnace shell with fan cooling, the Surface temperature is less than 50℃
Optional Spares
Vacuum system (Rotary vane vacuum pump, Diffusion pump, Molecular pump)
Atmosphere system (Float flow meter, Mass flow meter)
Quick release flange, Multi-way flange
Touching screen temperature controller