Scanning Electron Microscope

Desktop FEG-SEM/EDS

(*本機台不對外開放)

Facility manager:

Ms. Ying-Fen Huang 黃櫻芬

Email: huangyf@gate.sinica.edu.tw;

Tel: 02-2787-3229 (office)

02-2787-3228 (lab)

Facility location: 跨領域大樓 (Interdisciplinary Research Building for Science and Technology) B2B06

Spec.

FEG Source

Acc Voltage: 5kV, 10kV, 15kV

Vacuum mode: High vacuum, medium vacuum,

Charge reduction mode (low vacuum mode)

Sample size: < 23 mm (in diameter)

Sample height: < 30 mm

EDS function

Model: Phenom Pharos (Thermo Fisher Scientific)

Note:

本機台之樣品須於真空及電磁場中操作. 真空中易揮發的樣品, 磁性樣品, 易被電磁透鏡吸引或未適當固定的粉末及塊材型樣品, 及任何於真空中或電子束照射下可能造成汙染之樣品, 皆不得放入機台中!　使用者如任意放入樣品造成機台汙染, 除將立刻被停權, 並須賠償損失.

Some specimens, which may cause contamination of the chamber, are NOT allowed in this system. These forbidden specimens include (but not limited to) magnetic specimens, powder or bulk specimens which are not fixed on the sample holder properly, specimens which are volatile under electron beam.Users who cause any damage to this facility need to pay for the damage, and will be denied access to the system and possibly to the whole lab.

費用分攤標準

單位時數：3hrs (每次使用收費以時段為單位)

(1) 委託: $2000/hr (不含樣品製備)

(2) 自行操作: $1000/hr (限原已有本機台自行操作經驗之使用者)

訓練：因本機台精密易損，不再提供自行操作訓練。

有需求者請申請委託服務。

Au-coater (Quorum Q150T): 一次$1500 (*Au-coater is available for Pharos SEM users only)
3D OM: $1000/hr (OM is available for Pharos SEM & AC-TEM users only)
Plasma Cleaner (Gatan Solarus II): 一次$500 (*Plasma cleaner is only available for Pharos SEM or AC-TEM users)

Note:

Training course is no longer provided. The users can apply for operator service of this sytem.

The user with an operating license needs to be re-qualified if he/she is inactive on this system for 3 months. To avoid the damage caused by inexperienced users on this extremely complicated field-emission EM (electron microscope) system, the operating training of this system is not offered to those who do not have a proper college degree and experience in EM.

若未填寫儀器使用紀錄簿或未依正常程序操作導致影響他人使用, 使用者將被停止此機台使用權(期限由管理者依情節決定)，並可能被永永久停止本實驗室之申請使用權限。

If the user fails to write the logbook or operate this system properly, his/her operating license will be suspended (the suspended duration is up to the facility manager to decide), and it may result in the permanent termination of access to this lab.