Purpose:To measure the sound pressure level in a specific area

Model: LA-1240

Location: Tip 301

Purpose: To measure inductance, resistance,capacitance

Model: LCR-9053

Location: Tip 301

Purpose: For the power supply

Model: GPS-3303

Location: Tip 301

spec: this can supply 30V/3A and has two chennels

Purpose:  For the power supply

Model: OPE-305QI

Location: Tip 301

spec:  this can supply (+/-)30V/5A and has two chennels

Purpose:  To measure matching tool shape and surface roughness

Model: Infinite Focus G6

Location: Tip 301

spec:  Min.Vertical resolution : 10nm

  Measurement range : 200*200*100 [mm^3]

      ,Tilt : -15~90 [degree]