Education:
Ph.D., Materials Science and Engineering, University of Pennsylvania, Philadelphia, PA, May 2011
Dissertation: Design and fabrication of photonic microstructures by holographic lithography and pattern transformation.
M.S., Physics, University of Notre Dame, Notre Dame, Indiana, May 2005
B.S., Physics, University of Science and Technology of China, Hefei, Anhui, China, July 2003
Awards:
Excellent Award for outstanding support on pre-PDK standard cell library development, GlobalFoundries, September 2021.
Appreciation award for offering extra and timely help to decomp gds for simulation, GlobalFoundries, August 2021.
Hidden Hero of Technology Enablement for outstanding support on die area scaling calculator, GlobalFoundries, May 2021.
Spotlight Awards for outstanding support and guidance on PCell team’s RO macro design for TestSites, GlobalFoundries, April 2021.
Spotlight Awards for excellent customer support to achieve aggressive logic die scaling, GlobalFoundries, January 2021.
Appreciation award for spending extra time to training contractors to expand the expert users pool, GlobalFoundries, June 2020.
Spotlight Award for critical contributions to a strategic GlobalFoundries patent mining project, GlobalFoundries, 2018.
Spotlight Award for excellent contribution made to understanding of the nature and the origin of printable EUV mask defects, GlobalFoundries, 2011.
Arthur K. Doolittle Award from American Chemical Society, Division of Polymeric Materials Science and Engineering, 2011.
Professional experience:
2017 – Present:
2013-2017
2011-2012
GLOBALFOUNDRIES, Santa Clara, California September 2017– Present
Member of Technical Staff, DTCO in Design Enablement
Conduct to pre-PDK technology definition and development, including library architecture and cell prototyping, design rule engineering and library content delivery for PPAC benchmark and TestSites. Drive DTCO and interact with DRD, OPC, PI and GRV teams. (Excellent Award, September 2021)
Create engineering DRC and decomposition minidecks for pre-PDK library development. Drive mini-QA flow build and quality check for RnD library release.
Support multiple customers for PPA evaluation library and production library layout requests. Designed performance booster cells and customized mega cells for special applications. Optimized high usage critical cells. (Spotlight Award, January 2021)
Conduct DTCO support for standard cell library development with IP vendors. Evaluate function and drive strength richness and critical cell compaction. Review the waiver requests and provide advice.
Support testsite tapeout to evaluate key design patterning, PPA and yield. Lead meticulous critical waivers alignment with DRD/GRV/PI and prepare detailed documentation. Review silicon data and involve in MHC discussions.
Lead core benchmark data collection for die area scaling calculator. Conduct benchmark competitive analysis, including library reverse engineering and critical ground rule analysis. (Hidden Hero of Technology Enablement, May 2021)
Support DFM work on debugging yield killer and hotspot by performing OPC simulation and/or Rigorous simulation. Enabled DTCO-DFM (MAS) for 12LP+ LIB7 M6.
Provide reference seed cells, design guidelines and trainings to contractors and PCell team. (Appreciate Award, June 2020; Spotlight Award, April 2021)
Conduct the patent infringement analysis activities for legal team. (Spotlight Award, March 2018)
GLOBALFOUNDRIES, Santa Clara, California January 2013 – September 2017
Principle Engineer, DTCO in Technology Research
Constructed standard cell library for next generation technology definition including scaled FinFET, nano-sheet device and vertical FET.
Analyzed overlay and time-dependent dielectric breakdown issues using statistical method.
Conduct modeling and simulation for extreme ultraviolet (EUV) and deep ultraviolet (DUV) lithography.
Designed diffraction based overlay (DBO) marks for advanced semiconductor technologies.
GLOBALFOUNDRIES, Albany, New York April 2011 – December 2012
Senior Engineer, EUV Lithography
Inspected the EUV defectivity and determined their origin. (Spotlight Award, December 2011)
Simulated the effect of EUV/DUV light source and lens variation on the lithographic results.
Investigated the mask shadow effect in EUV lithography.
2017 – Present:
2012-2017
2011-2012
UNIVERSITY OF PENNSYLVANIA, Philadelphia, Pennsylvania May 2006 – April 2011
Research Assistant, Shu Yang Group, Department of Materials Science and Engineering
Performed quantitative analysis of the distortion of 3D photonic structures and the effects on photonic bandgap (PBG) properties.
Designed a dual-beam triple exposure optical setup to create 3D size scalable three-term diamond-like microstructures with minimal distortion.
Conceived complex 2D photonic crystals with analogue local symmetry as 12-fold quasicrystal. Analyzed origins of distinct photonic bandgap behaviors at different dielectric contrast levels.
Investigated PBG properties of 2D photonic crystals with anisotropic unit cells imprinted from poly (dimethylsiloxane) (PDMS) membranes under elastic deformation.
Studied pattern transformation of hydrogel microframes triggered by capillary force. Modeled kinetic process by dynamic Monte Carlo method. Explained formation of anti-phase boundaries.
Investigated pattern transformation triggered by mechanical instabilities in 3D SU-8 microstructures fabricated by interference lithography.
Performed photonic band structure calculations by applying the MIT photonic-bands (MPB) package to support experimental results.
Succeeded in growing high-quality branched cadmium sulfide (CdS) nanowires utilizing Metal-Organic Chemical Vapor Deposition (MOCVD).
UNIVERSITY OF PENNSYLVANIA, Philadelphia, Pennsylvania August 2006 – May 2007
Teaching Assistant, Department of Materials Science and Engineering
Tutored students in Physics of Materials.
UNIVERSITY OF NOTRE DAME, Notre Dame, Indiana May 2004 – May 2005
Research Assistant, Biocomplexity Group, Department of Mathematics
Modeled a micromass chick-limb cells culture by applying the Monte Carlo method. Constructed a new Potts-like model, implemented in a C program.
UNIVERSITY OF NOTRE DAME, Notre Dame, Indiana August 2003 – May 2005
Teaching Assistant, Department of Physics
Tutored students in Solid State Physics, Quantum Mechanics, Modern Physics, Electromagnetism, Mechanics, General Physics, Mathematical Methods for Physics, and Descriptive Astronomy.
Organized astronomical phenomena observation at the Nieuwland Science Hall Observatory.
UNIVERSITY OF SCIENCE & TECHNOLOGY OF CHINA, Hefei, Anhui, China September 2001 – July 2003
Research Assistant, Advanced Thin Films Group, Department of Physics
Performed electronic structure calculations for cobalt (Co)-doped zinc oxide (ZnO) by applying the linearized augmented plane wave (LAPW) method.
Journal Reviewer:
Macromocules
Materials Science and Engineering B
Ceramics International
Journal of Vacuum Science and Technology B
ChemPhysChem
Journal of Materials Chemistry C
RSC Advances
Physical Chemistry Chemical Physics
Applied Optics