Contact: Dr. Tatyana Kravchuk

Tel: +972- 4-829-3148

e-mail: ktatyana@technion.ac.il

The Surface Science Laboratory is equipped with a TOF.SIMS 5 from IONTOF GmbH (Germany) purchased in 2007.

Time-of-Flight Secondary Ion Mass Spectrometry (TOF-SIMS) is a very sensitive surface analytical technique, well established for many research and industrial applications. It provides detailed elemental and molecular information about surfaces, thin layers, interfaces, and full 3D analysis of the samples. Its design guarantees optimum performance in all fields of SIMS applications. The flexible, high precision sample manipulator well as the perfect charge compensation allows the analysis of virtually all kinds of samples. The TOF analyzer provides a high secondary ion transmission with high mass resolution and high lateral and depth resolution. The use is widespread, including semiconductors, polymers, nano-particles, multi-layers, insulators, metals, ceramics, biomaterials, pharmaceuticals and organic tissue.

The key features are:

- Elemental and molecular chemical detection, including hydrogen, with a high sensitivity range (~1ppm).

- High mass range with an option to simultaneously detect different ions, organic and inorganic (including hydrogen) materials, that allows retrospective analysis.

- High mass resolution at full transmission (M/DM>8000) even for insulating materials.

- High lateral resolution (<1 mm) with the field of view from mm² to cm²

- Depth resolution of about 1nm together with sputter speed of up to 10 mm /h

- 3D rendering software.

- In-situ sample cooling (down to 150K) or heating ( up to 900K).