Specification

Model: Inspect F50 from FEI

Resolution: 1.2 nm at 30 kV in SE, 4 nm at 1 kV in SE and 2 nm at 30 kV in BSE

Magnification: 20X – 10,00000X

Vacuum modes: High vacuum only

Acceleration voltage: 200 V – 30 kV

Detectors available: SE, BSE, EDS and EBSD