Numerical Simulation of Antireflection Coatings on Glass

Bin Jiang, Timothy Meagher (Portland State University), Peng Jiang (University of Florida)

We developed a simple and efficient multi-layer rigorous coupled-wave analysis method for surface-relief and multilevel gratings. The new approach is much simpler than traditional coupled-wave methods but still shows accurate results for excessively deep multilevel dielectric gratings. We applied this method to simulate fabrication of antireflection coatings on glass. The theoretical predication using our model matches the experimental reflection data of replicated nipple arrays very well.