Equipment

Plasma-Enhanced ALD

Thermal ALD

 Hollow Cathode Plasma ALD

Plasma-Enhanced & Thermal ALD

2-Zone Furnace CVD (2D materials)

1-Zone Furnace CVD (2D materials)

1-Zone Furnace CVD (2D materials)

Sputter (shared eq.)

E-Beam evaporator (shared eq.)

Reactive Ion Etching system (shared eq.)

Rapid Thermal Annealing system

Ozone generator

Spin coater

Water purification system

Glove box (shared eq.)

Probes station 1 (shared eq.)

Probe station 2 (shared eq.)

Semiconductor characterization system (shared eq.)

Pulse generator & Oscilloscope

Probe station 3 (shared eq.)

Gas sensor analyzer (shared eq.)

Optical Microscope

Bending stage

Monochromater

X-Ray Fluorescence (shared eq.)

Ellipsometry (shared eq.)