Pulsed Laser Deposition Chamber #1
Embedded Files
w/ RHEED
4 targets
Programmable superlattice synthesis
Pulsed Laser Deposition Chamber #2
w/ High-pressure RHEED
4 targets
Pulsed Laser Deposition Chamber #3
w/ High-pressure RHEED
4 targets
Excimer Laser #1
Coherent COMPexPRO 201
Excimer Laser #2
Coherent COMPexPRO 205F
Atomic Force Microscope
Park Systems
Probe station & Electronics
Impedance analyzer
TF analyzer 3000e (aixACCT Systems)
Picoammeter
Tube Furnace
/w O2 flow regulator
Max Temperature : 1200˚C
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