Heterogeneously-integrated semiconductor devices lab

์ด์ข… ์ง‘์  ์†Œ์ž ์—ฐ๊ตฌ์‹ค

๐Ÿ˜€๋ณธ ์—ฐ๊ตฌ์‹ค์€ ๋ฐ˜๋„์ฒด ๊ณต์ •์„ ํ†ตํ•ด ๋‹ค์–‘ํ•œ ๋ฐ˜๋„์ฒด ์†Œ์ž (MicroLED, Photodetector, Transistor) ์ œ์ž‘/ํ‰๊ฐ€ ๋ฐ ์ด์ข… ์ง‘์  (Heterogeneous integration) ์— ๊ด€ํ•œ ์—ฐ๊ตฌ๋ฅผ ์ˆ˜ํ–‰ํ•˜๊ณ  ์žˆ์Šต๋‹ˆ๋‹ค.

๐Ÿ˜€<์ƒ์‹œ> ํ˜„์žฌ ํ•™๋ถ€์—ฐ๊ตฌ์ƒ (3ํ•™๋…„), ๋Œ€ํ•™์›์ƒ(์„์‚ฌ, ๋ฐ•์‚ฌ)์„ ๋ชจ์ง‘์ค‘์ด๋‹ˆ ๋ณธ ์—ฐ๊ตฌ์‹ค ์—ฐ๊ตฌ ๋ถ„์•ผ ๋ฐ ํ™œ๋™, ๊ทธ๋ฆฌ๊ณ  ์—ฐ๊ตฌ์‹ค ์ƒํ™œ์— ๊ถ๊ธˆํ•œ ์‚ฌํ•ญ์ด ์žˆ๋‹ค๋ฉด ๋ฉด๋‹ด ์‹ ์ฒญ์„ ํ•ด์ฃผ์‹œ๊ธฐ ๋ฐ”๋ž๋‹ˆ๋‹ค.

-ํ•™์„์‚ฌ ์—ฐ๊ณ„๊ณผ์ • ๊ด€๋ จ ๋‚ด์šฉ (Link)

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