Turbo Pumping System

TPS-Flexy

Turbo pump : TwisTorr 74FS / TwisTorr 304FS

Fore pump : IDP-3 / IDP-7 / IDP-10 Dry pump

TPS-Mini

Turbo pump : TwisTorr 74FS

Fore pump : Diaphragm pump

TPS-Compact

Turbo pump : TwisTorr 74FS / TwisTorr 304FS

Fore pump : IDP-3 Dry pump

TPS-Mobile

Turbo pump : Any TwisTorr FS

Fore pump : Any IDP Dry pump or Rotary pump

Vacuum Gauge : XGS 600 controller

자료실