Turbo Molecular Pumps

TwisTorr FS Series

TwisTorr 74FS

  • Pumping speed : 40 L/sec (KF40), 50 L/sec (CFF2.75"), 60 L/sec (ISO63 or CFF4.5") - 질소 기준
  • Base pressure : 5x10^-10 mbar (with recomm. forepump)
  • Rotational speed : 70K rmp (1167 Hz)
  • Cooling : Air or Water

TwisTorr 304FS

  • Pumping speed : 250 L/sec (ISO100 or CFF6" or ISO160 or CFF8") - 질소 기준
  • Base pressure : 1x10^-10 mbar (with recomm. forepump)
  • Rotational speed : 60K rmp (1010 Hz)
  • Cooling : Air or Water

TwisTorr 404FS

  • Pumping speed : 380 L/sec (ISO100K -F or CFF6") - 질소 기준
  • Base pressure : 1x10^-10 mbar (with recomm. forepump)
  • Rotational speed : 40K to 50K rmp
  • Cooling : Air or Water

TwisTorr 704FS

  • Pumping speed : 660 L/sec (ISO160 or CFF8") - 질소 기준
  • Base pressure : 1x10^-10 mbar (with recomm. forepump)
  • Rotational speed : 40K~50K rmp
  • Cooling : Air or Water

TwisTorr 804FS

  • Pumping speed : 720 L/sec (ISO200K-F or ISO250K-F or CFF10") - 질소 기준
  • Base pressure : 1x10^-10 mbar (with recomm. forepump)
  • Rotational speed : 40K~50K rmp
  • Cooling : Air or Water

자료실

3D도면