Excimer Laser Repair Services

We are an expert service provider for the EXCIMER Laser system.

We offer service of re-marketing, repairs service, 193, 248, 308nm excimer laser refurbishments, and relocation services. Established the RD Lab Center and workshop in Taiwan. Warehouse for excimer laser spare parts stock.

Technology Service Item:

• Excimer Laser tube refurbish and Repair service

• Excimer Laser system Refurbishment and Retrofit

• Excimer Laser system relocation service

• Excimer Laser equipment parts trading

• Customized Spare parts development

Laser Equipment Model:

• COMPex, LPX 100, 200, 300 series

• Lambda Steel series LS1000, LS670

• Lambda SX excimer laser series LSX315C, LSX200C

• VYPER Series Laser

• CYMER

Excimer Laser Repair/Refurbishment Item:

• Excimer Laser Discharge Chambers (LDU)

• Output Coupler Lens (OC / HR Lens)

• Laser beam shutter

• Laser beam dump

• High Voltage Power Supply Repair (TDK Lambda LC1202L)

• Gas manifold module

• Circulation Fan motor controller

• Cryopump / Gas Purify Unit (GP CRYO)

• Hand-Held Terminal (HHT) / Keba KeTop C50

Other miscellaneous parts:

• LC1202L HVPS Cable

• Chamber Sapphire window / Quartz window

• MV10A gas valve

• Tube Pressure sensor

• Laser Control Workstation

• Optics, Lens, Annealing window, sealing window, condensorn optic, Homogenizer

• Thyratron LP-4189

• Lambda Physik / COHERENT parts improvement