308nm Excimer Laser Annealing Key features:
Material : Fused Silica
Customer-specific geometries (lengths up to 1,500.0mm)
Very high laser durability
Anti-reflective Coated [tabs>99%@308nm ] or uncoated
New Annealing Window available
Annealing Window Refurbishment
High Quality 308nm coating
Sapphire Window Material : High-Purities Al2O3 (99.999%)
Size : 60.0mm x5.0mm(T) / 50.0mm x3.0mm(T)
OC Lens
Excimer Laser Mirror
Beam Splitter
Windows
MgF2, CaF2 for 248nm and 193nm Laser Optics