Members

PEI-WEN LI

About Professor Li

• Pei-Wen Li (Senior Member, IEEE) received her Ph.D. degree in electrical engineering from Columbia University in New York City in 1994.

Since 2015, she is a Professor in the Institute of Electronics at National Chiao Tung University (NCTU) (as National Yang Ming Chiao Tung University (NYCU) in 2021). Prior to joining NCTU in 2015, she was a Distinguished Professor, Chair of Electrical Engineering Department, and Director of Nano Science and Technology at National Central University. She was a Research Visiting Scholar at Caltech in 2011-2012. She worked with Vanguard International Semiconductor Corporation on DRAM technology integration in 1995-1996. Her research themes focus on experimental germanium nanostructures and devices, encompassing quantum-dot single-electron transistors, photodetectors, light emitters, and thermoelectric devices, making use of self-assembly nanostructures in silicon integration technology. She has published more than 300 technical journal and conference papers and holds 8 patents.

Dr. Li is an IEEE Distinguished Lecturer and has served on the VLSI Technology and Education committees of IEEE Electron Devices Society. She has been an editor of IEEE Journal of Electron Device Society since 2022 and an editorial board member of Applied Physics A, Springer since 2020. She is a senior member of the IEEE Electron Device Society and serves on various IEEE conference committees (Silicon Nanoelectronics Workshop (SNW) and Electron Devices Technology and Manufacturing (EDTM) Conference).

• >30 years of experience in cleanroom operation, semiconductor device, and process development/integration

• >30 years of research experience in semiconductor materials, nanostructure fabrication, nanotechnology

• Comprehensive knowledge and experience in device fabrication (SiGe MOSFETs, power MOSFETs, Ge quantum-dot transistors, photodetectors)

• Extensive experience in teaching semiconductor device physics, MOSFETs, and FEOL processes 

• Hands-on experience in quality control, electrical/optical/structural characterizations, and statistical analysis

Research Interests 

Dr. Li’s main research theme focuses on experimental silicon-germanium nanostructures and devices, aiming at translating exploratory discoveries in nanoscience into practical technologies. Her present research encompasses germanium quantum-dot single-electron transistors, photodetectors, light sources, nonvolatile memory, and energy saving (photovoltaic and thermoelectric) devices, making use of self-assembly nanostructures in silicon integration technology. Her research group has successfully demonstrated a unique capability of precisely placing spherical Ge quantum dots of desired size, location and depth of penetration into the Si-containing layers using the control available through lithographic patterning and selective oxidation of SiGe pillars over the Si substrate in a self-organized manner. The successful nanoscale control of Ge quantum dot location and size has led to the creation of novel nanoelectronic, nanophotonic, and thermoelectric, and sensing devices.

Education:

  Ph.D.                                                             Columbia University, February 1994

  M.S. Electrical Engineering                   Columbia University, February 1991

  B.S. Electrophysics                                  National Chiao Tung University, June 1989

Industry Experience

  R&D Senior Engineer, Vanguard International Semiconductor Corporation                    March 1995 – September 1996

Pushing Technology Frontier and Process Integration for 64M DRAM

Project Leader of 0.35 mm 64M DRAM technology development, including design rule and process flow design, ultra-thin (<2 nm) gate oxide integrity, ONO capacitors, small contact (Aspect Ratio > 7) technology, and removal of etching-induced polymer and damaged silicon layer. Hold 5 patents in Si device and IC processing.

R&D Consultant, Episil Technologies Inc.                                                                                     June 2014 – May 2015

Device design for 700V Superjunction Power MOSFET

Academic Experience:

  Director, Nano Facility Center, NCTU                                                                                             August 2015-July 2018

Responsible for administering a 4”-6” nanofabrication facility/research center with 25 research scientists, engineers/technicians, and administrative staffs. Duties included recruiting one new research scientist and 4 engineers. Established a strategic plan for conducting research in heterogeneous integration for nanoelectronic, nanophotonic, NEMS/MEMS, sensing, and memory on Si platform. Granted significant facility funding by National Science Council of Taiwan for deep Si etcher, Focus Ion Beam, ultra-high vacuum metal deposition system, and electron-beam writing system.

  Associated Dean, Academic Affair, NCTU                                                                                      June 2016-July 2017

Responsible for strategic planning for reformation of general education curriculum. Developed a BS degree Honor program of Science, Technology, and Society with Juniata College, USA.

  Professor, Department of Electronics Engineering, NCTU                                                        February 2015-present

Conducting research in Ge quantum-dot single electron transistor for quantum computing as well as in Ge quantum-dot photodetectors and light-emitting devices for Si-based photonics/optical interconnect.

  Associated Dean, Academic Affair, National Central University (NCU)                                   August 2013-January 2015

           Responsible for strategic planning on teaching and learning development as well as on the accreditation of departments/institutes.

  Director, Center for Nano Science and Technology, NCU                                                            February 2011 – January 2015

Conducting research in nanoscience and technology for nanoelectronic, nanophotonic, and thermoelectric applications. Granted significant research funding (nine years from 2004 to 2013) by “National research program for nanoscience and technology, National Science Council of Taiwan” for high-temperature Ge quantum dot single electron transistors, Ge quantum dot photodetectors and InAs quantum dot photonic crystal light emitters, as well as Si/Ge quantum dot thermoelectric micro-coolers. Conducting industrial collaboration with Taiwan Semiconductor Manufacturing Corporation (TSMC) on the research and development of nanometer transistors for heterogeneous integration of ultra-high-mobility III-V antimonide transistors and CMOS integrated circuits on Si substrates, involving the epitaxial growth, gate dielectric preparation as well as HFET/MISFET device fabrication. Collaborating with Industrial Technology Research Institute (ITRI) on the reliability study of organic thin-film transistors and organic/nanoparticles memory devices. Collaborating with Caltech, USA, on Ge/Si nanophotonic transistors.

  Distinguished Professor, Department of Electrical Engineering, NCU                                     August 2005- January 2015

  Chair, Department of Electrical Engineering, NCU                                                                       August 2007– July 2010

Responsible for administering a department with 33 professors and more than 950 graduate/undergraduate students.  Duties included recruiting 4 new faculty members and research scientists, preparing 7 tenure cases and appointments, and appointing 2 chair professors in addition to supervising research scientists and doctoral students. Established a strategic plan of rebuilding after major losses of faculty with new foci on nanoelectronics, nanophotonics, ULSI design/testing, control/bioengineering, and power electronics/system. Recruited new faculty members and reorganizing a new research center in millimeter wave circuit/system and testing. Developed a MS degree program in analog integrated circuit design for Winbond Electronics Corporation staff on August 2008. Initiated the development of a new BS degree curriculum to include freshmen engineering courses to enhance program flexibility. A joint Electrical Engineering-Computer Engineering-Communication Engineering B.S. program was established in 2010. Led EE department on gaining IEET accreditation (2010-2012) and Taiwan Higher Education Institutions accreditation (2008).

  Associate Professor, Department of Electrical Engineering, NCU                                             August 2000 – July 2005

  Associate Professor, Department of Electronic Engineering, I-Shou University                  September 1996 – July 2000

Teaching and research activities included Ge quantum dot growth and single electron transistors, SiGe MOSFETs for high speed/micropower applications, AlGaN/GaN based photodetectors, InGaAsN-based heterojunction bipolar transistors and high electron mobility transistors, and SOI multiplexers and waveguide for telecommunication applications.

  Postdoctoral fellowship, Department of Electrical Engineering, Columbia University     February 1994 – January 1995

Studying low-temperature oxidation of SiGe and fabricating p-channel SiGe MOSFETs.

Honors and Awards:

Distinguished Professor from Chinese Electrical Engineering Society, 2015

Top 10 Rising Stars in Taiwan (Science and Technology) from Central News Agency in 2008

Distinguished Young Electrical Engineer from Chinese Electrical Engineering Society, 2005

International Electron Devices and Materials Symposia (IEDMS) best paper awards, 2007, 2010, 2012, 2013, 2014, 2016

Professional Activities:

     Committee member, IEEE Electron Device Society (EDS) VLSI Technology and Circuit, since 2017.12

     Committee member, IEEE EDS Education, since 2017. 12

     Distinguished Lecturer, IEEE EDS since 2017. 01

Technical Program-committee, Electron Devices Technology and Manufacturing Conference (EDTM), 2017－2020

Technical Program-committee, International Conference on Solid State Devices and Materials (SSDM), 2009－2020 

    Technical Program-committee, Si Nanoelectronics Workshop (SNW), 2014－2020

Technical Program Vice Chair, International Union of Materials Research Societies - International Conference in Asia 2013

Technical Program-committee, International Photovolatic Science and Engineering Conference (PVSEC), 2013

Technical Program-committee, IEEE International NanoElectronics Conference (INEC), 2011, 2019 

Program-committee, The 3rd IEEE International Symposium on Next-Generation Electronics (ISNE), 2014.

Program Chair, International Electron Device and Materials Symposium, 2010, 2012, 2014, 2016, 2017

Program-committee, International SiGe Technology and Device Meeting (ISTDM), 2008, 2021

Highlights of Research Contributions:

We have demonstrated a unique capability of controllably growing spherical Ge quantum dots of desired size at desired spatial locations using the control available through lithographic patterning and selective oxidation of SiGe nanostructures over the Si substrate in a self-organization manner. The successful nanoscale control of Ge quantum dot location and size led to the practical realization of exploratory nanoelectronic, nanophotonic, and thermoelectric, and sensing devices.