Overseas
T. Nakayama, H. Nakada, and T. Ohmori, SEARCH APPARATUS, SEARCH METHOD, AND SEMICONDUCTOR DEVICE MANUFACTURING SYSTEM, US20250077885A1, 2025.
H. Nakada, INFORMATION PROCESSING SYSTEM AND PROCESSING CONDITION DETERMINATION SYSTEM, US20240362526A1, 2024.
T. Ohmori, Y. Okuyama, and H. Nakada, COMPUTER SYSTEM AND APPARATUS CONDITION SEARCH SUPPORT METHOD, US20240353803A1, 2024.
H. Nakada, T. Ohmori, and N. Takano, Contour analysis apparatus, processing condition determination system, shape estimation system, semiconductor device manufacturing system, search apparatus, and data structure used in them, US12094146B2, 2024.
Y. Okuyama, T. Ohmori, M. Kurihara, and H. Nakada, Plasma processing apparatus including predictive control, US11907235B2, 2024.
N. Takano, H. Nakada, T. Ohmori, and Y. Okuyama, CONTOUR LINE ANALYSIS APPARATUS, PROCESSING DIMENSION EXTRACTION SYSTEM, PROCESSING CONDITION DECISION SYSTEM, SEMICONDUCTOR DEVICE MANUFACTURING SYSTEM, AND DATA STRUCTURE, US20240200938A1, 2024.
H. Kawanaka, H. Nakada, N. Saitou, and S. Matsushita, Additive manufacturing condition search apparatus, additive manufacturing condition search method, and reference sample, US12036609B2, 2024.
H. Nakada, T. Ohmori, Processing condition determination system and processing condition searching method, US11609188B2, 2023.
H. Nakada, T. Ohmori, and N. Takano, Contour line analysis device, processing condition determination system, shape inference system, semiconductor device manufacturing system, search device, and data structures to be used for same, TWI809703B, 2023.
Y. Okuyama, T. Ohmori, M. Kurihara, and H. Nakada, Search device, searching method, and plasma processing apparatus, US11657059B2, 2023.
M. Ishikawa, T. Ohmori, and H. Nakada, Processing recipe generation device, US11393084B2, 2022.
T. Ohmori, H. Nakada, M. Kurihara, T. Usui, and N. Kofuji, Computer, method for determining processing control parameter, substitute sample, measurement system, and measurement method, US11287782B2, 2022.
T, Ohmori, H. Nakada, N. Kofuji, M. Ishikawa, and M. Kurihara, Search device, search method and plasma processing apparatus, US11189470B2, 2021.
H. Nakada, T. Ohmori, T. Usui, M. Kurihara, and N. Kofuji, Substitute sample, method for determining control parameter of processing, and measurement system, US11152237B2, 2021.
H. Nakada, T. Ohmori, T. Usui, and M. Kurihara, System and method of determining processing condition, US11112775B2, 2021.
T. Ohmori, H. Nakada, M. Ishikawa, and M. Kurihara, Retrieval apparatus and retrieval method for semiconductor device processing, US10627788B2, 2020.
