Synthesis and Thin Film Deposition Facilities
Single-zone CVD tube furnace
Single-zone CVD tube furnace
High-temperature tube furnace
High-temperature tube furnace
Three-zone CVD tube furnace
Three-zone CVD tube furnace
Sputtering system
Sputtering system
Optical Microscope Facilities
Optical microscope
Optical microscope
Fluorescence microscope
Property Measurement Facilities
TI950 Nanoindentation system
TI950 Nanoindentation system
I-V probe station
I-V probe station
Electrochemical workstation
Electrochemical workstation