Infrared Variable Angle Spectroscopic Ellipsometry (IR-VASE®) Mark II is the most accurate method for optically characterizing thin films in the infrared. It provides accurate optical constants (n and k)
from 1.7 to 30 microns as well as film thickness, chemical information, semiconductor doping levels, and phonon absorption spectra (J.A. Woollam Co., Inc. IR-VASE specification sheet).