Publications

Google Scholar profile: http://scholar.google.com/citations?user=eytkhI0AAAAJ

ORCID profile: http://orcid.org/0000-0001-9405-6539

Journal Publications

• 1. B. Demir and R. L. Peterson, "Improved Heteroepitaxy of κ-Ga2O3 on c-plane Sapphire by Initial Mist Flow Stabilization during Mist Chemical Vapor Deposition," Thin Solid Films, 791: 140223 (2024), https://doi.org/10.1016/j.tsf.2024.140223 

  2. K. Mashooq, J. Jo, and R. L. Peterson, “Effect of Metal Capping Layer in Achieving Record High p-Type SnO Thin Film Transistor Mobility,” IEEE Transactions on Electron Devices 71 (1): 574-580 (2023), https://doi.org/10.1109/TED.2023.3332074

  3. J. D. Lenef, A. J. Gayle, J. Jo, K. M. Fuelling, S. K. Yadavalli, A. M. Ortiz-Ortiz, K. Sun, R. L. Peterson, and N. P. Dasgupta, "Tunable Sulfur Incorporation into Atomic Layer Deposition Films Using Solution Anion Exchange," Chemistry of Materials 35 (6): 2503-2517 (2023), https://doi.org/10.1021/acs.chemmater.2c03773

  4. (invited) K. Mashooq, J. Jo, and R. L. Peterson, “Demonstration and Analysis of Ambipolar SnO Inverter with High Gain,” Applied Physics Letters Special Topic: Metal Oxide Thin Film Electronics 122 (1): 013504 (2023), https://doi.org/10.1063/5.0131057 

  5. T. L. Newsom, C. R. Allemang, T. H. Cho, N. P. Dasgupta, and R. L. Peterson, “59.95 mV·dec-1  Subthreshold Swing Achieved in Zinc Tin Oxide TFTs with in situ Atomic Layer Deposited Al2O3 Gate Insulator,” IEEE Electron Device Letters, 44 (1): 72-75 (2023), https://doi.org/10.1109/LED.2022.3219351

  6. C. R. Allemang, T. H. Cho, N. P. Dasgupta, and R. L. Peterson, “Robustness of passivated ALD zinc tin oxide TFTs to aging and bias stress,” IEEE Trans. on Electron Devices, 69 (12): 6776-6782 (2022), https://doi.org/10.1109/TED.2022.3216791

  7. M.-H. Lee, T.-S. Chou, S. Bin Anooz, Z. Galazka, A. Popp, and R. L. Peterson, "Effect of post-metallization anneal on (100) Ga2O3/Ti–Au ohmic contact performance and interfacial degradation ," APL Materials 10 (9): 091105 (2022), https://doi.org/10.1063/5.0096245

  8. M.-H. Lee, T.-S. Chou, S. Bin Anooz, Z. Galazka, A. Popp, and R. L. Peterson, "Exploiting the Nanostructural Anisotropy of β-Ga2O3 to Demonstrate Giant Improvement in Titanium/Gold Ohmic Contacts," ACS Nano 16 (8): 11988-11997 (2022), https://doi.org/10.1021/acsnano.2c01957. For a free e-print for the first 50 viewers, see https://pubs.acs.org/articlesonrequest/AOR-R2PVZPNFFQCAQUSSIVCU 

  9. K. Mashooq, J. Jo, and R. L. Peterson, "Extraction of SnO subbandgap defect density by numerical modeling of p-type TFTs," IEEE Transactions on Electron Devices 69 (5): 2436-2422 (2022), https://doi.org/10.1109/TED.2022.3162803

  10. J. Jo, Z. Deng, N. Sanders, E. Kioupakis, and R. L. Peterson, "Experimental and theoretical study of hole scattering in RF sputtered p-type Cu2O thin films," Applied Physics Letters 120 (11): 112105 (2022). https://doi.org/10.1063/5.0078548

  11. H. N. Masten, J. D. Phillips, and R. L. Peterson, "Effects of high temperature annealing on the atomic layer deposited HfO2/β-Ga2O3 (010) interface," Journal of Applied Physics 131 (3): 035106 (2022). https://doi.org/10.1063/5.0070105

  12. M.-H. Lee and R. L. Peterson, "Process and characterization of ohmic contacts for beta-phase gallium oxide," Journal of Materials Research (invited feature review paper in a Focus Issue on Ultra-Wide Bandgap Materials, Devices, and Systems), 36 : 4771-4789 (2021).  https://doi.org/10.1557/s43578-021-00334-y. For a free online viewable article, see https://rdcu.be/cwpdb 

  13. J. D. Lenef, J. Jo, O. Trejo, D. J. Mandia, R. L. Peterson, and N. P. Dasgupta, “Plasma‐enhanced atomic layer deposition of copper oxide with tunable phase, oxidation state, and morphology for p‐type thin film transistors,” Journal of Physical Chemistry C, 125 (17): 9383-9390 (2021). https://doi.org/10.1021/acs.jpcc.1c00429 

  14. H. N. Masten, J. D. Phillips, and R. L. Peterson, "Charge trapping and recovery in ALD HfO2/β-Ga2O3 (010) MOS capacitors," Semiconductor Science and Technology, 36 (2): 04LT01 (2021). https://doi.org/10.1088/1361-6641/abe880 

  15. T. H. Cho, N. Farjam, C. R. Allemang, C. Pannier, E. Kazyak, C. Huber, M. Rose, O. Trejo, R. L. Peterson, K. Barton, and N. P. Dasgupta, “Area-Selective Atomic Layer Deposition Patterned by Electrohydrodynamic Jet Printing for Additive Manufacturing of Functional Materials and Devices,” ACS Nano, 14 (12): 17262-17272 (2020). http://doi.org/10.1021/acsnano.0c07297

  16. J. Jo, J. D. Lenef, K. Mashooq, O. Trejo, N. P. Dasgupta, and R. L. Peterson, “Causes of the Difference between Hall mobility and Field Effect Mobility for p-type RF Sputtered Cu2O Thin Film Transistors,” IEEE Transactions on Electron Devices, 67 (12): 5557-5563 (2020). https://doi.org/10.1109/TED.2020.3033832

  17. M.-H. Lee and R. L. Peterson, "Accelerated Aging Stability of β-Ga2O3 - Titanium/Gold Ohmic Interfaces," ACS Applied Materials & Interfaces 12 (41):46277-46287 (2020).https://doi.org/10.1021/acsami.0c10598

  18. C. R. Allemang, T. H. Cho, O. Trejo, S. Ravan, R. E. Rodríguez, N. P. Dasgupta, and R. L. Peterson, "High-Performance Zinc Tin Oxide TFTs with Active Layers Deposited by Atomic Layer Deposition," Advanced Electronic Materials 6 (7): 2000195 (2020). https://doi.org/10.1002/aelm.202000195

  19. Y. Son, B. Frost, Y. Zhao and R. L. Peterson, "Monolithic integration of high-voltage thin-film electronics on low-voltage silicon integrated circuits using a solution process," Nature Electronics 2 (11): 540-548 (2019). https://doi.org/10.1038/s41928-019-0316-0

  20. C. Allemang and R. L. Peterson, "Passivation of Thin Channel Zinc Tin Oxide TFTs using Al2O3 Deposited by O3-based Atomic Layer Deposition," IEEE Electron Device Letters 40 (7): 1120-1123 (2019). https://doi.org/10.1109/LED.2019.2914238

  21. H. N. Masten, J. D. Phillips, and R. L. Peterson, "Ternary Alloy Rare Earth Scandate as Dielectric for β-Ga2O3 MOS Structures," IEEE Transactions on Electron Devices 66 (6): 2489-2495 (2019). https://doi.org/10.1109/TED.2019.2911237

  22. M.-H. Lee and R. L. Peterson, "Annealing Induced Interfacial Evolution of Titanium/Gold Metallization on Unintentionally Doped β-Ga2O3," ECS Journal of Solid State Science and Technology: JSS Focus Issue on Gallium Oxide Based Materials and Devices 8 (7): Q3176 (2019). https://doi.org/10.1149/2.0321907jss

  23. (invited) M.-H. Lee and R. L. Peterson, "Interfacial reactions of titanium/gold ohmic contacts with Sn-doped β-Ga2O3," APL Materials Special Issue on Wide Bandgap Oxides 7 (2): 022524 (2019). https://doi.org/10.1063/1.5054624

  24. Z. Kabilova, C. Kurdak and R. L. Peterson, "Observation of impurity band conduction and variable range hopping in heavily doped (010) β-Ga2O3," Semiconductor Science and Technology 34 (3): 03LT02 (2019). http://doi.org/10.1088/1361-6641/ab0150

  25. Y. Son and R. L. Peterson, "Exploiting In Situ Redox and Diffusion of Molybdenum to Enable Thin‐Film Circuitry for Low‐Cost Wireless Energy Harvesting," Advanced Functional Materials 29 (5): 1806002 (2019). https://doi.org/10.1002/adfm.201806002, with frontispiece image

  26. Y. Son and R. L. Peterson, "The effects of localized tail states on charge transport mechanisms in amorphous zinc tin oxide Schottky diodes," Semiconductor Science and Technology 32: 12LT02 (2017).https://doi.org/10.1088/1361-6641/aa95d2

  27. W. Hu and R. L. Peterson, The roles of rare-earth dopants in solution-processed ZnO-based transparent conductive oxides," J. Appl Phys. 122: 105301 (2017). http://dx.doi.org/10.1063/1.4991943

  28. Y. Son, A. Liao, and R. L. Peterson, “Effect of relative humidity and pre-annealing temperature on spin-coated zinc tin oxide films made via the metal–organic decomposition route,” J Mater Chem C, 5: 8071-8081 (2017). http://dx.doi.org/10.1039/C7TC02343J

  29. Y. Son, J. Li, and Rebecca L. Peterson, "In Situ Chemical Modification of Schottky Barrier in Solution-Processed Zinc Tin Oxide Diode," ACS Applied Materials and Interfaces 8(36): 23801–23809 (2016). http://dx.doi.org/10.1021/acsami.6b05953

  30. M. M. Sadeghi, H. S. Kim, Rebecca L. Peterson, and K. Najafi, “Electrostatic Micro-Hydraulic Systems,” IEEE Journal of Microelectromechanical Systems 25(3): 557-569 (2016).

  31. W. Hu, B. Frost, and R. L. Peterson, "Thermally stable yttrium–scandium oxide high-k dielectrics deposited by a solution process," J. Phys. D: Applied Physics, 49(11): 115109 (2016). http://dx.doi.org/10.1088/0022-3727/49/11/115109

  32. J.J. McCullagh, T. Galchev, R. L. Peterson, R. Gordenker, Y. Zhang, J. Lynch, K. Najafi, “Long-term testing of a vibration harvesting system for the structural health monitoring of bridges,” Sensors and Actuators A: Physical, 217: 139-150 (2014).

  33. J. Y. Cho, J.-K. Woo, J. Yan, R. L. Peterson, and K. Najafi, “Fused-Silica Micro Birdbath Resonator Gyroscope (μ-BRG),” IEEE Journal of Microelectromechanical Systems 23(1): 66-77 (2014).

  34. W. Hu, R. L. Peterson,"Molybdenum as a contact material in zinc tin oxide thin film transistors," Appl. Phys. Lett. 104: 192105 (2014). http://dx.doi.org/10.1063/1.4875958

  35. K. K. Banger, R. L. Peterson, K. Mori, Y. Yamashita, T. Leedham, and H. Sirringhaus, “High Performance, Low Temperature Solution-Processed Barium and Strontium Doped Oxide Thin Film Transistors,” Chemistry of Materials 26: 1195−1203 (2014). http://dx.doi.org/10.1021/cm4035837

  36. E. E. Aktakka, R. L. Peterson, and K. Najafi, “High-Stroke and High-Deflection Bulk-PZT Diaphragm and Cantilever Micro Actuators and Effect of Pre-Stress on Device Performance”, IEEE/ASME J. Microelectromech. Syst. 23: 438-451 (2014).

  37. J. Y. Cho; J. Yan; J. A. Gregory; H. W. Eberhart, R. L. Peterson, K. Najafi. "3-Dimensional Blow Torch-Molding of Fused Silica Microstructures," IEEE J. Microelectromech. Syst., 22(6): 1276-1284 (2013).

  38. E. E. Aktakka, N. Ghafouri, C. E. Smith, R. L. Peterson, M. M. Hussain, K. Najafi, "Post-CMOS FinFET Integration of Bismuth Telluride and Antimony Telluride Thin-Film-Based Thermoelectric Devices on SoI Substrate," IEEE Electron Device Letters, 34(10), pp.1334-1336, Oct. 2013

  39. E. E. Aktakka, R. L. Peterson, and K. Najafi, “Wafer-Level Integration of High-Quality Bulk Piezoelectric Ceramics on Silicon,” IEEE Trans. Elec. Dev. 60 (6), pp. 2022-2030, (2013).

  40. M. M. Sadeghi, R. L. Peterson, and K. Najafi, “Air Flow Sensing using Micro-wire-bonded Hair-like Hot-wire Anemometry,” J. Micromech. Microeng. 23, pp. 085107 (2013).

  41. W. Hu and R. L. Peterson, “Charge Transport in Solution Processed Zinc Tin Oxide Thin Film Transistors,” J. Materials Research, 27(17), pp. 2286-2292 (2012). http://dx.doi.org/10.1557/jmr.2012.134

  42. T. V. Galchev, J. McCullagh, R. L. Peterson and K. Najafi, “Harvesting traffic-induced vibrations for structural health monitoring of bridges,” J. Micromech. Microeng. 21, 104005 (2011).

  43. A. J. Gross, G. S. Hwang, B. Huang, H. Yang, N. Ghafouri, H. Kim, R. L. Peterson, C. Uher, M. Kaviany, and K. Najafi, “Multistage Planar Thermoelectric Microcoolers,” IEEE/ASME J. Microelectromechanical Systems, vol. 20, no. 5, pp. 1201-1210, 2011.

  44. K.K. Banger, Y. Yamashita, K. Mori, R. L. Peterson, T. Leedham, J. Rickard, and H. Sirringhaus. “Low-temperature, high-performance solution-processed metal oxide thin-film transistors formed by a ‘sol-gel on chip’ process,” Nature Materials 10, 45 (2011). http://dx.doi.org/10.1038/nmat2914

  45. B. Sun, R. L. Peterson, H. Sirringhaus and K. Mori, "Low-temperature sintering of in-plane self-assembled ZnO nanorods for solution-processed high-performance thin film transistors," J. Phys. Chem. C. 11, 18831 (2007).

  46. R. L. Peterson, K. D. Hobart, H. Yin, F. J. Kub and J. C. Sturm, "Maximizing uniaxial tensile strain in large-area silicon-on-insulator islands on compliant substrates," J. Appl. Phys. 100, 023537 (2006).

  47. R. L. Peterson, K. D. Hobart, F. J. Kub, H. Yin and J. C. Sturm, "Reduced buckling in one dimension vs two dimensions of a compressively strained film on a compliant substrate," Appl. Phys. Lett. 88, 201913 (2006).

  48. R. L. Peterson, K. D. Hobart, F. J. Kub and J. C. Sturm, "Comment on 'Fabrication of strained silicon on insulator by strain transfer process' [Appl. Phys. Lett. 87, 051921 (2005)]," Appl. Phys. Lett. 88, 146101 (2006).

  49. H. Yin, K. D. Hobart, R. L. Peterson, F. J. Kub and J. C. Sturm, "Ultra-thin strained-silicon-on-insulator by stress balance on compliant substrates and FET performance," IEEE Trans. on Elec. Dev. 52, 2007 (2005).

  50. H. Yin, K. D. Hobart, R. L. Peterson, S. R. Shieh, T. S. Duffy and J. C. Sturm, "Tunable uniaxial vs biaxial in-plane strain in integrated silicon and silicon-germanium thin films using compliant substrates," Appl. Phys. Lett. 87, 061922 (2005).

  51. R. L. Peterson and R. F. Drayton, "A CPW T-resonator technique for electrical characterization of microwave substrates," IEEE Microwave and Wireless Components Lett. 12, 90 (2002).

 Archival Conference Publications

• 1. C. Allemang and R. L. Peterson, “Increased blocking voltage in solution processed ZTO HVTFTs through drain offset,” in Proceedings of the 75th Annual Device Research Conference (DRC), 2017, pp. 1–2. https://doi.org/10.1109/DRC.2017.7999509 

  2. Y. Son and R. L. Peterson, “Enhancing breakdown voltage in amorphous zinc tin oxide Schottky diode,” in Proceedings of the 75th Annual Device Research Conference (DRC), 2017, pp. 1–2. https://doi.org/10.1109/DRC.2017.7999460 

  3. I. Shahosseini, R.L. Peterson, E.E. Aktakka and K. Najafi, “Electromagnetic Generator Optimization for Non-Resonant Energy Harvester,” IEEE Sensors Conference, Valencia, Spain, pp. 178-181, Nov. 2014.

  4. K. Kumar, A. Besharatian, L.P. Bernal, R.L. Peterson and K. Najafi, “Theoretical & Experimental Analysis of Active Valve Pumping for High Flow Rate Applications,” Proceedings of the ASME 2013 International Mechanical Congress and Exposition (IMECE 2013), San Diego, CA, Nov. 15-21, 2013, paper IMECE2013-64127.

  5. E. E. Aktakka, R. L. Peterson, and K. Najafi, “A 6-DOF Piezoelectric Micro Vibratory Stage Based on Multi-Axis Distributed-Electrode Excitation of PZT/Si Unimorph T-Beams,” Proc. IEEE 17th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers 2013), Barcelona, Spain, pp. 1583-1586, June 2013.

  6. A. Besharatian, K. Kumar, R. L. Peterson, L. P. Bernal, and K. Najafi, “Valve-only Pumping in Mechanical Gas Micropumps,” Proc. IEEE 17th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers 2013), Barcelona, Spain, pp. 2640-2643, June 2013.

  7. Z. Cao, Y. Yuan, J. Y. Cho, G. He, R. L. Peterson, and K. Najafi, “Fabrication of Multi-Layer Vertically Stacked Fused Silica Microsystems,” Proc. IEEE 17th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers 2013), Barcelona, Spain, pp. 1583-1586, June 2013.

  8. M. M. Sadeghi, R. L. Peterson, and K. Najafi, “A 2-D Directional Air Flow Sensor Array Made Using Stereolithography and MEMS Micro-Hydraulic Structures,” Proc. IEEE 17th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers 2013), Barcelona, Spain, pp. 722-725, June 2013.

  9. S. Y. Yee, R. L. Peterson, L. P. Bernal, and K. Najafi, “Highly-Reliable Electrostatic Actuator Using Filleted Electrode Made With Photoresist Solvent Reflow,” Proc. IEEE 17th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers 2013), Barcelona, Spain, pp. 1617-1620, June 2013.

  10. S. Y. Yee, R. L. Peterson, L. P. Bernal, and K. Najafi, “High-Speed Air Microjet Arrays Produced Using Acoustic Streaming for Micro Propulsion,” Proc. IEEE 17th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers 2013), Barcelona, Spain, pp. 1595-1598, June 2013.

  11. J. Cho, J. Yan, J. Woo, R. L. Peterson, and K. Najafi, “A High-Q Birdbath Resonator Gyroscope (BRG),” Proc. IEEE 17th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers 2013), Barcelona, Spain, pp. 1847-1850, June 2013.

  12. E. E. Aktakka, R. L. Peterson, and K. Najafi, “A 3-DOF Piezoelectric Micro Vibratory Stage Based on Bulk-PZT/Silicon Crab-Leg Suspensions,” Proc. 26th IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS 2013), Taipei, Taiwan, pp. 576-579, January 2013.

  13. D. Egert, J. Kaplan, R. L. Peterson, and K. Najafi, “Iodine-Treated Starch as Easy-to-Use, Biodegradable Material with Controllable Swelling and Stiffening Properties,” Proc. 26th IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS 2013), Taipei, Taiwan, pp. 217-220, January 2013.

  14. 10.  Z. Cao, B. VanDerElzen, K. J. Owen, J. Yan, G. He, R. L. Peterson, D. Grimard, and K. Najafi, “DRIE of Fused Silica,” Proc. 26th IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS 2013), Taipei, Taiwan, pp. 361-364, January 2013.

  15. J. Cho, J. Yan, J. A. Gregory, H. Eberhart, R. L. Peterson, and K. Najafi, “High-Q Fused Silica Birdbath and Hemispherical 3-D Resonators Made by Blow Torch Molding,” Proc. 26th IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS 2013), Taipei, Taiwan, pp. 177-180, January 2013.

  16. M. M. Sadeghi, K. Dowling, R. L. Peterson, and K. Najafi, “High Sensitivity, High Density Micro-Hydraulic Force Sensor Array Utilizing Stereo-Lithography Fabrication Technique,” Proc. 26th IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS 2013), Taipei, Taiwan, pp. 673-676, January 2013.

  17. M. M. Sadeghi, R. L. Peterson, and K. Najafi, “High-Speed Electrostatic Micro-Hydraulics for Sensing and Actuation,” Proc. 26th IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS 2013), Taipei, Taiwan, pp. 1191-1194, January 2013.

  18. Y. Tang, R. L. Peterson, and K. Najafi, “Technology for Fabricating Dense 3-D Microstructure Arrays for Biomimetic Hair-Like Sensors Proc. 26th IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS 2013), Taipei, Taiwan, pp. 355-358, January 2013.

  19. Z. Wu, A. Peczalski, V. A. Thakar, Z. Cao, Y. Yuan, G. He, R. L. Peterson, K. Najafi, M. Rais-Zadeh, “Piezoelectrically Transduced High-Q Silica Micro Resonators,” Proc. 26th IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS 2013), Taipei, Taiwan, pp. 122-125, January 2013.

  20. E. E. Aktakka, C. E. Smith, N. Ghafouri, R. L. Peterson, M. M. Hussain, and K. Najafi, “Heterogeneous integration of co-evaporated bismuth/antimony telluride thin films based thermoelectric harvester on FinFET CMOS Chip,” The 12th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2012), Atlanta, GA, pp. 97-100, Dec. 2-5, 2012.

  21. (Best Student Paper Award) J. McCullagh, R. L. Peterson, T. Galchev, R. Gordenker, Y. Zhang, J. Lynch, and K. Najafi, “Short-term and long-term testing of a vibration harvesting system for bridge health monitoring,” The 12th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2012), Atlanta, GA, Atlanta, GA, pp. 109-112, Dec. 2-5, 2012.

  22. (Best Paper Award, MEMS Division) K. Kumar, A. Besharatian, L. P. Bernal, R. L. Peterson, and K. Najafi, “A Multiphysics reduced order model of valve pumping in a 4-stage vacuum micropump,” Proceedings of the ASME 2012 International Mechanical Congress and Exposition (IMECE 2012), Houston, TX, Nov. 9-15, 2012, 293-300.

  23. E. E. Aktakka, R. L. Peterson, and K. Najafi, “Wet etching and uniform wafer-level thinning of bulk piezoelectric ceramics on silicon,” Solid-State Sensors, Actuators and Microsystems Workshop (Hilton Head 2012), Hilton Head, SC, pp. 256-257, June 3-7, 2012.

  24. Seow Yuen Yee, Rebecca L. Peterson, Luis P. Bernal, and Khalil Najafi, “High-Frequency Large-Deflection Electrostatic Diaphragm Actuators with Maximized Volume Displacement,” Solid-State Sensors, Actuators and Microsystems Workshop (Hilton Head 2012), Hilton Head, SC, pp. 393-396, June 3-7, 2012.

  25. M. M. Sadeghi, R. L. Peterson and K. Najafi, “Hair-based sensors for micro-autonomous systems,”  in Micro- and Nanotechnology Sensors, Systems, and Applications IV, edited by T. George, M. Saif Islam, A. Dutta, Proceedings of the SPIE Vol. 8373 (SPIE, Bellingham, WA, 2012) 8373-1L.

  26. Ali Besharatian, Karthik Kumar, Rebecca L. Peterson, Luis P. Bernal, and Khalil Najafi, “A Scalable, Modular, Multi-Stage, Peristaltic, Electrostatic Gas Micro-Pump,” Proc. 25th IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS 2012), Paris, France, Jan. 29 – Feb. 2, 2012, pp.1001-1004.

  27. K. J. Owen, B. VanDerElzen, R. L. Peterson and K. Najafi, “High Aspect Ratio Deep Silicon Etching,” Proc. 25th IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS 2012), Paris, France, Jan. 29 – Feb. 2, 2012, pp.251-254.

  28. Mahdi M. Sadeghi, Rebecca L. Peterson, and Khalil Najafi, "Micro-Hydraulic Structure for High Performance Bio-Mimetic Air Flow Sensor Arrays," Digest of the IEEE International Electron Devices Meeting (IEDM 2011), Washington, DC, Dec. 5-7, 2011, pp. 29.4.1-29.4.4.

  29. Ethem Erkan Aktakka, Rebecca L. Peterson, Khalil Najafi, “Multi-Layer PZT Stacking Process for Piezoelectric Bimorph Energy Harvesters,” Proceedings of the 11th Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2011), Seoul, Korea, pp. 139-142, Nov. 2011.

  30. E. E. Aktakka, R. L. Peterson, K. Najafi, “Thinned PZT on SOI Process and Design Optimization for Piezoelectric Inertial Energy Harvesting,” 16th International Conference on Solid-State Sensors, Actuators, and Microsystems (Transducers'11), Beijing, China, pp. 1649-1652, June 2011.

  31. D. Egert, R. L. Peterson and K. Najafi, " Parylene microprobes with engineered stiffness and shape for improved insertion,”16th International Conference on Solid-State Sensors, Actuators, and Microsystems (Transducers'11), Beijing, China, pp. 198-201, June 2011.

  32. T.V. Galchev, J. McCullagh, R. L. Peterson, and K. Najafi, “Harvesting Traffic Induced Bridge Vibrations,” 16th International Conference on Solid-State Sensors, Actuators, and Microsystems (Transducers'11), Beijing, China, pp. 1661-1664, June 2011.

  33. K. Najafi, T.V. Galchev, E. Aktakka, R. L. Peterson, and J. McCullagh, “Microsystems for Energy Harvesting,” 16th International Conference on Solid-State Sensors, Actuators, and Microsystems (Transducers'11), Beijing, China, p. 1845-48, June 2011. (invited)

  34. Tzeno Galchev, James McCullagh, Rebecca L. Peterson, Khalil Najafi, Amir Mortazawi, "Energy harvesting of radio frequency and vibration energy to enable wireless sensor monitoring of civil infrastructure," Proc. SPIE Smart Structures/NDE, San Diego, CA, v 7983, p 798314, March 2011. (SPIE Smart Structures and Materials, Nondestructive Characterization for Composite Materials, Aerospace Engineering, Civil Infrastructure, and Homeland Security 2011, H. Felix Wu, Editor.)

  35. E. E. Aktakka, R. L. Peterson, K. Najafi, “A Self-Supplied Inertial Piezoelectric Energy Harvester with Power Management IC”, IEEE International Solid-State Circuits Conference (ISSCC’11), San Francisco, USA, pp. 120-121, Feb. 2011.

  36. E. E. Aktakka, R. L. Peterson, K. Najafi, “A CMOS-Compatible Piezoelectric Vibration Energy Scavenger Based on the Integration of Bulk PZT Films on Silicon”, IEEE International Electron Devices Meeting (IEDM’10), San Francisco, USA, pp. 31.5.1-31.5.4, Dec. 2010.

  37. T. Galchev, J. McCullagh, R. L. Peterson, and K. Najafi (2010), “A vibration harvesting system for bridge health monitoring applications,” The 10th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2010), Leuven, Belgium, Nov/Dec 2010, pp. 179-182.

  38. M. Kurata, J. P. Lynch, T. Galchev, M. P. Flynn, P. Hipley, V. Jacob, G. van der Linden, A. Mortazawi, K. Najafi, R. L. Peterson, L.-H. Sheng, D. Sylvester, E. Thometz (2010), "Two-Tiered Self-Powered Wireless Monitoring System Architecture for Bridge Health Management," Proc. SPIE Smart Structures and Materials, San Diego, CA, March 2010, v. 7649, p. 76490K.

  39. R. L. Peterson and J. C. Sturm, "Dynamics of uniform Si/SiGe uniaxial strain generation on compliant insulating substrates," Third International SiGe Technology and Device Mtg. (ISTDM), Princeton, NJ, May 2006, pp. 254-255.

  40. R. L. Peterson, K. D. Hobart, H. Yin and J. C. Sturm, "Crystal-direction dependence of uniaxial tensile strain in ultra-thin SOI," Proc. IEEE SOI Conference, Charleston, SC, Oct. 2004, pp. 39-41.

  41. (Invited) J. C. Sturm, H. Yin, R. L. Peterson, K. D. Hobart and F. J. Kub, "High-perfection approaches to Si-based devices through strained layer epitaxy," Proc. International Conference on Solid State Devices and Materials (SSDM), Tokyo, Japan, Sept. 2004, pp. 220-221.

  42. (Invited) J. C. Sturm, H. Yin, R. L. Peterson, K. D. Hobart and F. J. Kub, "Strain engineering in SiGe/Si-on-insulator structures using compliant substrate and stress balance approaches," 2nd International SiGe Technology and Device Mtg. (ISTDM), Frankfurt, Germany, May 2004, pp. 29-30.

  43. R. L. Peterson, H. Ying, J. C. Sturm, "Island scaling effects on photoluminescence of strained SiGe/Si (100)," Mat. Res. Soc. Symp. Proc. 809, 133 (2004).

  44. H. Yin, K. D. Hobart, S. R. Shieh, R. L. Peterson, T. S. Duffy and J. C. Sturm, "Interference-enhanced Raman scattering in strain characterization of ultra-thin strained SiGe and Si films on insulator," Mat. Res. Soc. Symp. Proc. 809, 115 (2004).

  45. H. Yin, K. D. Hobart, R. L. Peterson, F. J. Kub, S. R. Shieh, T. S. Duffy and J. C. Sturm, "Fully-depleted strained-Si on insulator NMOSFETs without relaxed SiGe buffers," Technical Digest International Electron Devices Mtg. (IEDM), Washington, DC, Dec. 2003, pp. 3.2.1-3.2.4.

  46. H. Yin, R. L. Peterson, K. D. Hobart, S. R. Shieh, T. S. Duffy and J. C. Sturm, "Relaxed SiGe layers with high Ge content by compliant substrates," Mat. Res. Soc. Symp. Proc. 765, D4.7/G1.7 (2003).

  47. H. Yin, K. D. Hobart, R. L. Peterson, S. R. Shieh, T. S. Duffy and J. C. Sturm, "Strained-Si-on-insulator MOSFET without relaxed SiGe buffer layer," ICSI3: The SiGe Conference Digest, Santa Fe, NM, Mar. 2003, pp. 181-183.

  48. R. L. Peterson, I. Itotia and R. F. Drayton, "High frequency methods for characterization of oxidized porous silicon," 2001 IEEE Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems Digest, Ann Arbor, MI, Sept. 2001, pp. 210-214.

  49. R. L. Peterson and R. F. Drayton, "Dielectric properties of oxidized porous silicon in a low resistivity substrate," IEEE MTT-S Int'l Microwave Symp. Dig., May 2001, pp. 767-770.

  50. R. L. Peterson and R. F. Drayton, "A CPW T-resonator technique for electrical characterization of microwave substrate," 57th Automatic RF Techniques Group Conf. Digest, May 2001, pp. 59-63.

 Refereed Conference Abstracts

• 1. A. M. Abed and R. L. Peterson, “Structural, Optical, and Electrical Properties of RF Magnetron Sputtered Germanium Dioxide Thin Films,” APS March Meeting, Minneapolis, MN, March 4-8, 2024 (oral presentation)

  2. T. H. Cho, N. Farjam, T. L. Newsom, C. R. Allemang, R. L. Peterson, K. Barton, N. P. Dasgupta, “Integrating Area-Selective ALD with Electrohydrodynamic-Jet Printing to Enable Additive Nanomanufacturing,” 23rd International Conference on Atomic Layer Deposition (ALD 2023), Bellevue, WA, July 23-26, 2023 (oral presentation)

  3. A. M. Abed and R. L. Peterson, “Effect of Post-Deposition Annealing on Crystal Structure of RF Magnetron Sputtered Germanium Dioxide Thin Films,” 65th Electronic Materials Conference, Santa Barbara, CA, June 28-30, 2023 (oral presentation)

  4. 4. A. G. Jacobs, J. A. Spencer, M. J. Tadjer, B. N. Feygelson, M.-H. Lee, R. L. Peterson, F. Alema, A. Osinsky, Y. Zhang, K. D. Hobart, T. J. Anderson, “Silicon Ion Implant Activation in -Al0.4Ga1.6O3,” 65th Electronic Materials Conference, Santa Barbara, CA, June 28-30, 2023 (oral presentation)

  5. A. M. Abed and R. L. Peterson, “Effect of Post-Deposition Annealing on Crystal Structure of RF Magnetron Sputtered Germanium Dioxide Thin Films,” Thin Films and Plasma for Future Microelectronics, 2023 AVS Michigan Chapter Spring Symposium, Ann Arbor, MI, Jun 7, 2023 (poster presentation)

  6. T. L. Newsom and R. L. Peterson, “Ion Beam Etch of a Multi-layer Stack to Form Sub-micron Vertical Fins,” Thin Films and Plasma for Future Microelectronics, 2023 AVS Michigan Chapter Spring Symposium, Ann Arbor, MI, Jun 7, 2023 (poster presentation)

  7. (plenary) R. L. Peterson, “The Role of Academic Nanofabrication Facilities in Growing the Semiconductor Ecosystem,” Thin Films and Plasma for Future Microelectronics, 2023 AVS Michigan Chapter Spring Symposium, Ann Arbor, MI, Jun 7, 2023 (oral presentation)

  8. (invited) R. L. Peterson, C. R. Allemang, T. L. Newsom, T. H. Cho, N. P. Dasgupta, “ALD of Robust Amorphous Oxide TFTs with Turn-on at the Boltzmann Limit,” International Conference on Semiconductor Technology for Ultra Large Scale Integrated Circuits and Thin Film Transistors (ULSIC VS TFT 8), Otaru, Japan, May 14-18, 2023 (oral presentation)

  9. J. D. Lenef, A. J. Gayle, J. Jo, K. M. Fuelling, S. K. Yadavalli, A. M. Ortiz-Ortiz, K. Sun, R. L. Peterson, N. P. Dasgupta, “Tunable Sulfur Incorporation into Atomic Layer Deposited Films using Solution Anion Exchange,” 15th Annual AIChE Midwest Regional Conference, Chicago, IL, April 11-12, 2023 (oral presentation)

  10. B. Demir and R. L. Peterson, “Investigation of Crystallization Pathway of Solution-Processed Magnesium-Alloyed Zinc Tin Oxide Thin Films,” 2022 Materials Research Society (MRS) Fall Meeting, Boston, MA, November 27 - December 2, 2022 (oral presentation)

  11. (invited) R. L. Peterson, “Interfacial characteristics of ohmic contacts and dielectrics on Ga2O3,” 4th International Workshop on Gallium Oxide and Related Materials (IWGO-4), Nagano, Japan, October 23-27, 2022 (virtual presentation)

  12. M.-H. Lee, A. G. Jacobs, M. J. Tadjer, and R. L. Peterson, “Ion implantation doping for β-AlxGa2-xO3, and the Application for Ohmic Contact Formation,” 64th Electronic Materials Conference, Columbus, OH, June 29-July 1, 2022 (oral presentation)

  13. K. Mashooq, J. Jo, and R. L. Peterson, “Investigation of p-type SnO Sub-bandgap Defects by Comparing Experimental Transistor Data to Numerical Device Simulations,” 64th Electronic Materials Conference, Columbus, OH, June 29-July 1, 2022 (oral presentation)

  14. J. Jo, Z. Deng, N. Sanders, E. Kioupakis, and R. L. Peterson, “Study of hole scattering mechanisms in p-type Cu2O,” 64th Electronic Materials Conference, Columbus, OH, June 29-July 1, 2022 (oral presentation)

  15. L. Miaja-Avila, B.W. Caplins, A.N. Chiaramonti, M.-H. Lee, R. L. Peterson, and N.A. Sanford, “EUV Pulsed Atom Probe Tomography of β-Ga2O3, Semiconductor Materials,” 64th Electronic Materials Conference, Columbus, OH, June 29-July 1, 2022 (oral presentation)

  16. J. Jo, K. Mashooq, and R. L. Peterson, “N:Cu2O S/D for low contact resistance p-type Cu2O thin film transistor,” 80th Device Research Conference, Columbus, OH, June 26-29, 2022 (oral presentation)

  17. K. Mashooq, J. Jo, and R. L. Peterson, “Demonstration and analysis of ambipolar SnO inverter with high gain,” 80th Device Research Conference, Columbus, OH, June 26-29, 2022 (poster presentation)

  18. M.-H. Lee, T.-S. Chou, S. Bin Anooz, Z. Galazka, A. Popp, and R. L. Peterson, “Using Crystalline Anisotropy to Improve Ohmic Contact Performance for β-Ga2O3,,” Compound Semiconductor Workshop (CSW), Ann Arbor, MI, June 1-3, 2022 (oral presentation)

  19. H. N. Masten, J. D. Phillips, R. L. Peterson, “Impacts of Annealing and Diffusion at the ALD HfO2/β-Ga2O3, (010) Interface,” Compound Semiconductor Workshop (CSW), Ann Arbor, MI, June 1-3, 2022 (oral presentation)

  20. (invited) H. N. Masten, J. D. Phillips, and R. L. Peterson, “ALD HfO2/β-Ga2O3, Reliability for Future Power Devices,” The 241st ECS (Electrochemical Society) Meeting, Vancouver, BC, Canada, May 29 - June 2, 2022. (oral presentation.) 

  21. (invited) R. L. Peterson, C. R. Allemang, T. H. Cho, J. D. Lenef, N. Farjam, J. Jo, C. P. Pannier, E. Kazyak, C. Huber, S. Ravan, M. Rose, R. E. Rodríguez, K. Mashooq, O. Trejo, K. Barton, N. P. Dasgupta, “N-type and p-type oxide electronics through area-selective atomic layer deposition,” Materials Research Society (MRS) Spring 2022 Symposium MF03: Materials and Methods for Fabricating Flexible and Large-Area Electronics, virtual meeting, May 23-25, 2022 (oral presentation).

  22. J. D. Lenef, J. Jo, O. Trejo, A. J. Gayle, R. L. Peterson, and N. P. Dasgupta, “Integrating ALD with Anion Exchange Chemistry to Tune p-type CuOxSy Semiconductors with Atomic Precision,” Materials Research Society Spring 2022 Symposium EQ06: Surfaces and Interfaces in Electronics and Photonics, Honolulu, HI, May 8-13, 2022 (oral presentation)

  23. (invited) R. L. Peterson, “Doping and ohmic contacts in ultra-wide bandgap semiconductors for power electronic devices,” The Workshop on Compound Semiconductor Materials and Devices (WOCSEMMAD) 2022, Destin/Miramar Beach, FL, Feb. 20-23, 2022.

  24. (invited) R. L. Peterson, C. Allemang, T. Cho, J. D. Lenef, J. Jo, and N. P. Dasgupta, “Scalable Atomic Layer Deposition for P-type and N-type Oxide Semiconductor TFTs,” The 21st International Meeting on Information Display (IMID 2021), Seoul, Korea, August 25-27, 2021 (virtual presentation). 

  25. T. H. Cho, N, Farjam, C. R. Allemang, C. Pannier, E. Kazyak, C. Huber, M. Rose, O. Trejo, R. L. Peterson, K. Barton, N. P. Dasgupta, “Area-Selective Atomic Layer Deposition Patterned by Electrohydrodynamic Jet Printing for Additive Nanomanufacturing of Functional Materials and Devices,” AVS 21st International Conference on Atomic Layer Deposition (ALD/ALE 2021) (virtual), June 27-30, 2021 (oral presentation).

  26. Julia D. Lenef, Jaesung Jo, Orlando Trejo, David J. Mandia, Rebecca L. Peterson, and Neil P. Dasgupta, “Plasma-enhanced atomic layer deposition of copper oxide semiconductors with tunable phase, oxidation state, and morphology for p-type thin film transistors,” AVS 21st International Conference on Atomic Layer Deposition (ALD/ALE 2021) (virtual), June 27-30, 2021 (oral presentation).

  27. C. R. Allemang, T. H. Cho, N. P. Dasgupta, R. L. Peterson, “Temporal Stability of Zinc Tin Oxide TFTs with Active Layers Deposited by Atomic Layer Deposition,”63rd Electronic Materials Conference, virtual, June 23-25, 2021 (oral presentation).

  28. J. Jo, J. D. Lenef, K. Mashooq, O. Trejo, N. P. Dasgupta, R. L. Peterson, “Understanding the Differences between Hall Mobility and FE Mobility for p-type Cu2O Thin-Film Transistor,” 63rd Electronic Materials Conference, virtual, June 23-25, 2021 (oral presentation).

  29. C. R. Allemang, T. Lu, S. Ravan, T. H. Cho, N P. Dasgupta, R. L. Peterson, “Steep Subthreshold Swing ALD ZTO TFTs with in situ Gate Insulator,” 79th Device Research Conference, virtual, June 20-23, 2021 (oral presentation).

  30. M.-H. Lee and R. L. Peterson, “The effect of silicon ion-implant on charge transport mechanisms of Ti/Au ohmic contacts to β-Ga2O3,” Materials Research Society (MRS) Spring/Fall Meeting, Nov. 27-Dec 4, 2020 (virtual oral presentation).

  31. (invited) R. L. Peterson and M.-H. Lee, “Process and Characterization of Ohmic Contacts for Beta-phase Gallium Oxide,” Materials Research Society (MRS) Spring/Fall Meeting, Nov. 27-Dec 4, 2020 (virtual oral presentation).

  32. T. H. Cho, C. Allemang, N. Farjam, O. Trejo, S. Ravan, R. Rodriguez, K. Barton, R. L. Peterson, and N. P. Dasgupta, "ALD and PE-ALD of High-Mobility Zinc-Tin-Oxide Semiconductor Layers: Towards Printable Electronic Devices," AVS ALD/ALE 2020 Symposium Virtual Meeting, June 29 - July 1, 2020 (virtual oral presentation).

  33. M.-H. Lee and R. L. Peterson, "Process Influence on the Performance and Aging Stability of Ti/Au Ohmic Contacts to Beta-phase Gallium Oxide," 62nd Electronic Materials Conference, June 24-26, 2020 (virtual oral presentation).

  34. C. Allemang, T. H. Cho, O. Trejo, S. Ravan, N. P. Dasgupta, and R. L. Peterson, "Atomic Layer Deposition of Zinc-Tin-Oxide for High Field Effect Mobility Films," 62nd Electronic Materials Conference, June 24-26, 2020 (virtual oral presentation).

  35. C. Allemang, T. H. Cho, N. Farjam, O. Trejo, K. Barton, N. P. Dasgupta, and  R. L. Peterson, "Area-selective Atomic Layer Deposition of High Mobility Zinc-Tin-Oxide for Thin-film Transistors Patterned by Electrohydrodynamic-jet Printing," 78th Device Research Conference, June 21-24, 2020 (virtual poster presentation).

  36. (invited) Y. Son, C. Allemang, B. Frost, Y. Zhao, and R. L. Peterson, “Monolithic Integration of Zinc Tin Oxide Electronics,” 237th Electrochemical Society (ECS) Meeting, Montreal, Canada, May 10-15, 2020 (cancelled due to COVID-19). 

  37. R. L. Peterson, "3-D Integration of Zinc Tin Oxide Electronics," Transparent Conductive Oxides - Fundamentals and Applications (TCO 2019), Leipzig, Germany, September 23-27, 2019 (oral presentation, no abstract). 

  38. M.-H. Lee and R. L. Peterson, “Investigation of Interfacial Evolution at Beta Phase Gallium Oxide Titanium/Gold Ohmic Junctions,” International Workshop on Gallium Oxide, Columbus, OH, August 12-15, 2019 (oral presentation).

  39. (invited) R. L. Peterson, H. N. Masten, J. D. Phillips, and M.-H. Lee, “Interfacial defects in β‐Ga2O3,” International Conference on Defects in Semiconductors (ICDS‐30), Seattle, WA, July 21-26, 2019 (oral presentation).

  40. T. Cho‚ N. Farjam‚ C. Pannier‚ C. Huber‚ O. Trejo‚ C. Allemang‚ E. Kazyak‚ R. Peterson‚ K. Barton‚ N. P. Dasgupta “Area-Selective ALD of ZnO Films Patterned by Electrohydrodynamic Jet Printing of Polymers with Sub-Micron Resolution,” American Vacuum Society 19th International Conference on Atomic Layer Deposition, Bellevue, WA, July 21-24, 2019.

  41. M.-H. Lee and R. L. Peterson, “A study of the interface of β-Ga2O3 with Ti/Au contacts,” 61st Electronic Materials Conference, Ann Arbor, MI, June 26-28, 2019 (oral presentation).

  42. H. N. Masten, J. D. Phillips, R. L. Peterson, “Deep Depletion and Hole Generation in β-Ga2O3 MOS Capacitors,” 61st Electronic Materials Conference, Ann Arbor, MI, June 26-28, 2019 (oral presentation).

  43. C. Allemang, O. Trejo, N. P. Dasgupta, R. L. Peterson, “Electrical Performance of Annealed Zinc-Tin-Oxide Thin-Film Transistors Made by H2O-Based Thermal Atomic Layer Deposition,” 61st Electronic Materials Conference, Ann Arbor, MI, June 26-28, 2019 (oral presentation).

  44. (invited) R. L. Peterson, "Materials Interfaces for β-Ga2O3 Power Devices," 46th International Conference on Metallurgical Coatings and Thin Films (ICMCTF), San Diego, CA, May 19-24, 2019.

  45. H. Masten, J. Phillips, and R. L. Peterson, "Ga2O3 MOSCAPs with low Dit using yttrium-scandium oxide high-k dielectric," 3rd US Workshop on Gallium Oxide, Columbus, OH, August 15-16, 2018 (oral presentation).

  46. H. Masten, J. Phillips, and R. L. Peterson, "Ternary Alloy Rare Earth Scandate as Dielectric for β- Ga2O3 MOS Structures,” 60th Electronic Materials Conference, Santa Barbara, CA, June 27-29, 2018 (oral presentation).

  47. (invited) R. L. Peterson, C. Allemang, and Y. Son, “ ‘Electronics on Anything’ Using Wide Bandgap Amorphous Oxide Semiconductors,” Compound Semiconductor Week, 2018, pp. 455-456.

  48. (invited) R. L. Peterson, Z. Kabilova, and C. Kurdak, “Electron transport in beta-gallium oxide,” German Physics Society Annual Meeting (Deutschen Physikalischen Gesselschaft e.V. 2018), focused session on Oxide Semiconductors for Novel Devices, Berlin, Germany, March 11-14, 2018.

  49. Z. Kabilova, C. Kurdak, and R. L. Peterson, "Charge transport in highly doped (010) β-Ga2O3 single crystals made by edge-defined film-fed growth," 2nd International Workshop on Gallium Oxide and Related Materials, Parma, Italy, Sept. 12-15, 2017 (oral presentation).

  50. H. Masten, J. Phillips, and R. L. Peterson, "Photo-assisted capacitance-voltage characterization of interface states in SiO2/β-Ga2O3 (010) MOS capacitors," 2nd International Workshop on Gallium Oxide and Related Materials, Parma, Italy, Sept. 12-15, 2017 (oral presentation).

  51. Y. Son and R. L. Peterson, “In situ oxidation, reduction, and diffusion between bottom electrodes and solution-processed amorphous oxide semiconductor,” 59th Electronic Materials Conference, South Bend, IN June 28-30, 2017 (oral presentation).

  52. W. Hu and R. L. Peterson, “Enhanced Zinc Tin Oxide TFT Bias Stress Stability by Yttrium Incorporation," Materials Research Society Symposium, Fall 2016, Boston, MA (oral presentation).

  53. W. Hu and R. L. Peterson, “The Role of Rare-Earth Dopants in ZnO-based Transparent Conducting Oxides,” 58th Electronic Materials Conference, Newark, Delaware, June 22-24, 2016 (oral presentation).

  54. A. Liao and R. L. Peterson, “Sub-100nm Paraffin Wax Layers Made Via Solution Process,” 58th Electronic Materials Conference, Newark, Delaware, June 22-24, 2016 (oral presentation.)

  55. (invited) R. L. Peterson and W. Hu, “The Role of Yttrium in Zinc-Oxide and Zinc-Tin-Oxide,” SPIE Photonics West Conference 9749: Oxide-based Materials and Devices VII, San Francisco, CA, February 15-18, 2016.

  56. (invited) C.-L. Lo and R. L. Peterson, “Ink Deposition of Quaternary Amorphous Oxide Semiconductors for Electronic and Optoelectronic Devices,” abstract FTh4F.1, Frontiers in Optics/Laser Science 2015, San Jose, CA, October 18-22, 2015.

  57. W. Hu, B. Frost and R. L. Peterson, “Ternary Alloys of Rare Earth Scandates as Printable High-k Dielectrics,” p. 81, 57th Electronic Materials Conference, Columbus, OH, June 24-26, 2015 (oral presentation).

  58. (invited) R. L. Peterson, “Progress in solution-based oxide devices,” SPIE Photonics West Conference 9364: Oxide-based Materials and Devices VI, San Francisco, CA, February 8-11, 2015.

  59. J. Li and R. L. Peterson, “Schottky Diodes Made with Solution-Processed Amorphous Zinc Tin Oxide,” 8th International Workshop on Zinc Oxide and Related Materials, Niagara Falls, ON, September 2014 (oral presentation).

  60. K. K. Banger, J. Socratous, R. L. Peterson, K. Mori, Y. Yamashita, T. Leedham, H. Sirringhaus, “Fabrication of highly stable alkaline earth doped transparent InZnO semiconductors for thin film transistors via molecular alkoxide based chemistries,” 248th National Meeting of the American Chemical Society, San Francisco, CA, August 13, 2014.

  61. B. Frost, W. Hu, and R. L. Peterson, “Yttrium and scandium oxide high-k dielectric thin films made via solution process,” 56th Electronic Materials Conference, Santa Barbara, CA, June 25-27, 2014 (poster presentation)

  62. W. Hu and R. L. Peterson, “Molybdenum as a contact material for solution-processed zinc tin oxide thin film transistors,” pp. 43-44, 55th Electronic Materials Conference, South Bend, IN, June 26-28, 2013 (oral presentation). 

  63. W. Hu, I. Bonachera, and R. L. Peterson, "Donor and defect states in solution-processed zinc tin oxide,” Materials Research Society Symposium, Boston, MA, Nov. 2011 (poster presentation).

  64. W. Hu and R. L. Peterson, “Solution-Processed Zinc Oxide-Based Thin Film Transistors for Display Backplanes,” Society for Information Display (SID) Vehicle Displays and Interfaces Symposium 2011, Dearborn, MI, Oct. 2011 (oral presentation).

  65. N. Ghafouri, R. L. Peterson, C. Uher, and K. Najafi, “Effect of Substrates on Co-evaporated Bi2Te3 and Sb2Te3 Thin Films,” in Proc. 30th International Conference on Thermoelectrics (ICT), July 2011, pp. 227 (oral presentation).

  66. N. Ghafouri, R. L. Peterson, C. Uher, and K. Najafi, “Thermoelectric Properties Optimization of Thermally Co-evaporated P-type (Bi0.25Sb0.75)2Te3 Thin Films,” in Proc. 30th International Conference on Thermoelectrics, July 2011, pp. 339 (poster presentation).

  67. M. Sadeghi, R. L. Peterson, K. Peterson, R. Fearing, and K. Najafi, “Air Flow Sensing on Autonomous Mobile Platforms Using Micro-scale Hot-wire Anemometry,” 27th Army Science Conference, Orlando, FL, Nov/Dec 2010, paper AP-11.

  68. T. Galchev, J. McCullagh, E. E. Aktakka, R. L. Peterson, and K. Najafi (2010), “Energy harvesting from low frequency and arbitrary vibrations,” High Efficiency Energy Conversion, Energy Management, and Low Power Systems for Aerospace/Military Electronics (Energy 10) Workshop, Redstone Arsenal, AL, Sept. 2010.

  69. K. K. Banger, R. L. Peterson, K. Mori, Y. Yamashita, T. Leedham, H. Sirringhaus, “Development of a materials chemistry process for solution fabricated amorphous metal oxide thin film transistors,” Abstracts of the 240th American Chemical Society National Meeting, Fall 2010, abstract 751, August 2010.

  70. W. D. Nothwang, L. Pierce, R.L. Peterson, K. Wise, K. Najafi, Y. Gianchandani, and K. Sarabandi, “Full Spectrum Imaging for Micro-Autonomous Systems and Technologies,” International Symposium on Spectral Sensing Research, Springfield, MO, June 2010.

  71. R. L. Peterson, K. Banger, Y. Yamashita, K.  Mori and H. Sirringhaus, "Solution-processed InZnO and InGaZnO thin film transistors with mobilities greater than 10 cm2V-1s-1 and good bias stress stability," European Materials Research Society Symposium (E-MRS), Strasbourg, France, June 2009.

  72. R. L. Peterson, B. Sun and H. Sirringhaus, "Electrical characterization of ZnO nanorod thin film transistors," Materials Research Society Symposium, Fall 2008, Boston, MA.

  73. R. L. Peterson, K. D. Hobart, F. J. Kub and J. C. Sturm, "One-dimensional vs. two-dimensional buckling of compressively-strained films on a compliant substrates," Materials Research Society Symposium, Boston, MA, Nov. 2005.

  74. R. L. Peterson, K. D. Hobart, F. J. Kub and J. C. Sturm, "Buckling time-scale for compressively-strained thin films on compliant layers of various thickness," Electronic Materials Conference 2005 Tech. Prog., Santa Barbara, CA, June 2005, pp. 60-61.

  75. R. L. Peterson, H. Yin, K. D. Hobart, T. S. Duffy and J. C. Sturm, "Uniaxially-tensile strained ultra-thin silicon-on-insulator with up to 1.1% strain," Electronic Materials Conference 2004 Tech. Prog., Notre Dame, IN, June 2004, pp. 33-34.

Invited Talks

• 1. (invited) R. L. Peterson, “Back-end-of-line device integration using atomic layer deposition,” Rochester Institute of Technology Microsystems Engineering Seminar, March 1, 2024 (virtual)

  2. (invited) R. L. Peterson, “Ultra wide bandgap oxide semiconductor materials and devices,” Applied Physics program seminar, University of Michigan, Ann Arbor, MI, Sept. 20, 2023

  3. (plenary) R. L. Peterson, “The Role of Academic Nanofabrication Facilities in Growing the Semiconductor Ecosystem,” Thin Films and Plasma for Future Microelectronics, 2023 AVS Michigan Chapter Spring Symposium, Ann Arbor, MI, Jun 7, 2023.

  4. (invited) R. L. Peterson, C. R. Allemang, T. L. Newsom, T. H. Cho, N. P. Dasgupta, “ALD of Robust Amorphous Oxide TFTs with Turn-on at the Boltzmann Limit,” International Conference on Semiconductor Technology for Ultra Large Scale Integrated Circuits and Thin Film Transistors (ULSIC VS TFT 8), Otaru, Japan, May 14-18, 2023.

  5. (invited) R. L. Peterson and M.-H. Lee, “Interfacial characteristics of ohmic contacts and dielectrics on Ga2O3,” 4th International Workshop on Gallium Oxide and Related Materials (IWGO-4), Nagano, Japan, October 23-27, 2022. 

  6. (invited) R. L. Peterson, “Oxide Semiconductor Electronics: from BEOL thin film circuits to high-voltage UWBG devices,” TSMC Corporate Research Seminar Series (virtual), June 22, 2022.

  7. (invited) H. Masten, J. Phillips, and B. Peterson, "ALD HfO2/β-Ga2O3 reliability for future power devices," 241st ECS Meeting, Vancouver, BC, Canada, May 29 - June 2, 2022.

  8. (invited) R. L. Peterson, C. R. Allemang, T. H. Cho, J. D. Lenef, N. Farjam, J. Jo, C. P. Pannier, E. Kazyak, C. Huber, S. Ravan, M. Rose, R. E. Rodríguez, K. Mashooq, O. Trejo, K. Barton, N. P. Dasgupta, “N-type and p-type oxide electronics through area-selective atomic layer deposition,” Materials Research Society (MRS) Spring 2022 Symposium MF03: Materials and Methods for Fabricating Flexible and Large-Area Electronics, virtual meeting, May 23-25, 2022.

  9. (invited) R. L. Peterson, “Ohmic Contacts to Beta-Phase Gallium Oxide and its Alloys,” University of Utah-led Gallium Oxide MURI Team biweekly seminar, March 29, 2022.

  10. (invited) R. L. Peterson, “Doping and ohmic contacts in ultra-wide bandgap semiconductors for power electronic devices,” The Workshop on Compound Semiconductor Materials and Devices (WOCSEMMAD) 2022, Destin/Miramar Beach, FL, Feb. 20-23, 2022

  11. (invited) R. L. Peterson, N. P. Dasgupta, and K. Barton, “Scalable Atomic Layer Deposition for P-type and N-type Oxide Semiconductor TFTs,” 2021 Inaugural Michigan Materials Research Institute Symposium, Ann Arbor, MI, November 9-10, 2021.

  12. (invited) R. L. Peterson, C. Allemang, T. Cho, J. D. Lenef, J. Jo, and N. P. Dasgupta, “Scalable Atomic Layer Deposition for P-type and N-type Oxide Semiconductor TFTs,” The 21st International Meeting on Information Display (IMID 2021), Seoul, Korea, August 25-27, 2021 (virtual presentation). 

  13. (invited) R. L. Peterson,  "Oxide Semiconductor Electronics: from BEOL thin film circuits to high-voltage UWBG devices,"  Stanford EE's Electronics Systems Technology  seminar series, March 30, 2021.

  14. (invited) R. L. Peterson and M.-H. Lee, “Process and Characterization of Ohmic Contacts for Beta-phase Gallium Oxide,” Materials Research Society (MRS) Spring/Fall Meeting, Nov. 27-Dec 4, 2020 (virtual oral presentation).

  15. (invited) Y. Son, C. Allemang, B. Frost, Y. Zhao, and R. L. Peterson, “Monolithic Integration of Zinc Tin Oxide Electronics,” 237th Electrochemical Society (ECS) Meeting, Montreal, Canada, May 10-15, 2020 (cancelled due to COVID-19). 

  16. (invited) R. L. Peterson, “Exploiting In Situ Interfacial Reactions for Oxide Semiconductor Power Devices,” Institute Functional Oxides for Energy-Efficient IT, Helmholtz Zentrum Berlin, Germany, December 12, 2019.

  17. (invited) R. L. Peterson, “Materials Interfaces for β-Ga2O3 Power Devices,” Institut für Festkörperphysik (Institute for Solid State Physics) at TU Berlin, Berlin, Germany,December 9, 2019.

  18. (invited) R. L. Peterson, “Interfaces for Oxide Power Semiconductor Devices,” Ferdinand-Braun Leibniz-Institut für Höchstfrequenztechnik (FBH (Institute for High-frequency Technologies)) in Berlin, Germany, December 2, 2019.

  19. (invited) R. L. Peterson, “Solution-processed amorphous oxide semiconductors for thin-film power management circuits,” Universität Leipzig, Felix-Bloch-Institut für Festkörperphysik (Institute for Solid State Physics), Leipzig, Germany, November 27, 2019.

  20. (invited) R. L. Peterson, “Exploiting In Situ Interfacial Reactions for Oxide Semiconductor Power Devices,” E.ON Energy Research Center, RWTH Aachen University, Aachen, Germany, October 29, 2019.

  21. (invited) R. L. Peterson, "Materials Interfaces for β-Ga2O3 Power Devices," Leibniz Science Campus for Growth and Fundamentals of Oxides (GraFOx), Berlin, Germany, October 10, 2019.

  22. (invited) R. L. Peterson, H. N. Masten, J. D. Phillips, and M.-H. Lee, “Interfacial defects in β‐Ga2O3,” International Conference on Defects in Semiconductors (ICDS‐30), Seattle, WA, July 21-26, 2019.

  23. (invited) R. L. Peterson, "Materials Interfaces for β-Ga2O3 Power Devices," 46th International Conference on Metallurgical Coatings and Thin Films (ICMCTF), San Diego, CA, May 19-24, 2019.

  24. (invited) R. L. Peterson, "Exploiting In Situ Interfacial Reactions for Oxide Semiconductor Power Devices," University of Michigan Materials Science and Engineering Department Seminar, Ann Arbor, MI, March 1, 2019.

  25. (invited) R. L. Peterson, C. Allemang, and Y. Son, “ ‘Electronics on Anything’ Using Wide Bandgap Amorphous Oxide Semiconductors,” Compound Semiconductor Week 2018, Boston, MA, May 29 – June 1, 2018.

  26. (invited) R. L. Peterson, Z. Kabilova, and C. Kurdak, “Electron transport in beta-gallium oxide,” German Physics Society Annual Meeting (Deutschen Physikalischen Gesselschaft e.V. 2018) focused session on Oxide Semiconductors for Novel Devices, Berlin, Germany, March 11-14, 2018 (one of two invited talks by speakers from outside Germany.) 

  27. (invited) R. L. Peterson, “Oxide Semiconductors for Power Electronics,” University of Notre Dame EE Department Seminar, South Bend, IN, January 25, 2018. 

  28. (invited) R. L. Peterson, “Heterointegration: Electronics on Anything,” LNF Users Symposium, University of Michigan, Ann Arbor, MI, December 6, 2017. 

  29. (invited) R. L. Peterson, “Advances in Oxide Power Electronics,” University of Minnesota – Twin Cities ECE Department Seminar, Minneapolis, MN, November 3, 2017. 

  30. (invited) R. L. Peterson, “Amorphous Oxide Electronics: Going Beyond Displays,” Istituto Italiano di Tecnologia, Center for Nano Science and Technology, Milan, Italy, Sept. 11, 2017. 

  31. (invited) R. L. Peterson, “Recent Advances in Oxide Power Electronics,” University of Nairobi Department of Physics, Nairobi, Kenya, August 28, 2017. 

  32. (invited) R. L. Peterson, “Advances in Oxide Power Electronics,” Makerere University, Department of Electrical and Computer Engineering, Kampala, Uganda, August 21, 2017. 

  33. (invited) R. L. Peterson, “A thermodynamic approach to Ga2O3 contacts and interfaces,” 2016 2nd AFRL Workshop on Beta-Ga2O3: Synthesis, Characterization and Applications, Arlington, VA, December 12-13, 2016. 

  34. (invited) R. L. Peterson, “Glassy electronics: exploiting the amorphous phase,” Center for Wireless Integrated MicroSensing and Systems (WIMS2) Seminar, University of Michigan, Ann Arbor, MI, April 15, 2016. 

  35. (invited) R. L. Peterson, “Glassy electronics: exploiting the amorphous phase,” University of Texas at Dallas, Center for Engineering Innovation Special Seminar, Dallas, TX, March 17, 2016. 

  36. (invited) R. L. Peterson, “Glassy electronics: exploiting the amorphous phase,” Cornell University ECE Department Seminar, Ithaca, NY, February 19, 2016. 

  37. (invited) R. L. Peterson, “The Role of Yttrium in Zinc-Oxide and Zinc-Tin-Oxide,” SPIE Photonics West Conference 9749: Oxide-based Materials and Devices VII, San Francisco, CA, February 14, 2016. 

  38. (invited) C.-L. Lo and R. L. Peterson, “Ink Deposition of Quaternary Amorphous Oxide Semiconductors for Electronic and Optoelectronic Devices,” Frontiers in Optics/Laser Science 2015, San Jose, CA, October 22, 2015. 

  39. (invited) R. L. Peterson, “3-D Additive Processing of Multi-layer Transistor Systems,” Beyond! CMOS Workshop, Max Planck Institute – Halle, Ringberg, Germany, Oct. 9, 2015. 

  40. (invited) R. L. Peterson, “Printed Electronic Materials and Devices,” Brady Corporation, Milwaukee, WI, July 21, 2015. 

  41. (invited) R. L. Peterson, “Amorphous Oxide Thin Film Semiconductor Devices,” Hemlock Semiconductor Corp (HSC), Hemlock, MI, April 30, 2015.

  42. (invited) R. L. Peterson, “Progress in solution-based oxide devices,” SPIE Photonics West Conference 9364: Oxide-based Materials and Devices VI, San Francisco, CA, February 8, 2015. 

  43. (invited) R. L. Peterson, “Amorphous Zinc Oxide Alloy Electronics,” Bowling Green State University Dept. of Physics Seminar, Bowling Green, OH, December 4, 2014. 

  44. (invited) R. L. Peterson, “Manufacturable Amorphous Oxide Alloy Electronics,” Air Force Research Laboratory, RYDD branch seminar, Dayton, OH, June 4, 2014. 

  45. (invited) R. L. Peterson, “Invisible and Vanishing Printable Electronics,” University of Michigan, Electrical and Computer Engineering Staff Seminar Series, Ann Arbor, MI, November 14, 2013.

  46. (invited) R. L. Peterson, "Electronics and Sensors at the Vanishing Point," University of Michigan, Applied Physics Program Seminar, Ann Arbor, MI, September 11, 2013. 

  47. (invited) R. L. Peterson, “Electronics and Sensors at the Vanishing Point,” University of Michigan, Electrical Engineering and Computer Science Department Seminar, Ann Arbor, MI, April 26, 2013. 

  48. (invited) R. L. Peterson, “Printable Nanomaterials for Next Generation Electronics and Sensors,” Wayne State University, Electrical and Computer Engineering Department Seminar, Detroit, MI, March 22, 2013. 

  49. (invited) M. M. Sadeghi, R. L. Peterson and K. Najafi, “Hair-based sensors for micro-autonomous systems,” SPIE Defense Security + Sensing 2012, Baltimore, MD, April 23-27, 2012. 

  50. (invited) J. Cho, B. Peterson, and K. Najafi, “DRIE of Single-Crystal Silicon for MEMS Inertial Sensors”, NNIN and LNF Workshop on Micro and Nano Machining for High Aspect Ratio Structures, Ann Arbor, MI, Feb. 28, 2012. 

  51. (invited) B. VanDerElzen, G. He, B. Peterson, and K. Najafi, “High Aspect Ratio Deep Reactive Ion Etching of Fused Silica,” DARPA MTO Glass Etching Workshop, Newport Beach, CA, Feb. 13, 2012. 

  52. (invited) W. Hu, and R. L. Peterson, “Solution-Processed Zinc Oxide-Based Thin Film Transistors for Display Backplanes,” SID Vehicle Displays and Interfaces 2011 Workshop, Dearborn, MI, October 20-21, 2011. 

  53. (invited) K. Najafi and R. L. Peterson, “Review of Selected Research Topics in MEMS and Microsystems,” Army Research Laboratory Seminar, Adelphi, MD, June 16, 2010. 

  54. (invited) M. Sadeghi, B. Peterson, K. Najafi, K. Peterson, and R. Fearing, “HAIR-based airflow sensing on crawlers,” Micro Autonomous Systems Technologies (MAST) Program Webinar, [online], May 25, 2010.

Patents Awarded

• 1. I. Shahosseini, K. Najafi, R. L. Peterson, “Electromagnetic Energy Transducer,” US Patent No. 10,734,877. Date Filed: June 10, 2014, Date of Patent: August 4, 2020.

  2. K. Najafi, R. L. Peterson, J. McCullagh, “Full-Wave Charge Pump With Low-Voltage Startup,” Patent No. 10,250,235. Date Filed: November 30, 2016, Date of Patent: April 2, 2019.

  3. K. Najafi, R. L. Peterson, J. Y. Cho, Z. Cao, G. He, J. Gregory, Y. Yuan, “Microsystem device and methods for fabricating the same,” Patent No. US 9,778,039. Date Filed: Oct 31, 2012, Date of Patent: Oct. 3, 2017.

  4. K. Najafi, M. Sadeghi, R. L. Peterson, “Micro-Hydraulic Device,” Patent No. US 9,502,995. Date Filed: Dec 4, 2013, Date of Patent: November 22, 2016.

  5. K. Najafi, M. Sadeghi, R. L. Peterson, “Fluid Flow Sensor”, Patent No. US 9,400,197. Date Filed: Sept. 19, 2012. Date of Patent: July 26, 2016.

Patent Applications

• 1. R. L. Peterson, M.-H. Lee, M. J. Tadjer, A. G. Jacobs, “Doped Aluminum-Alloyed Gallium Oxide and Ohmic Contacts”, US Patent Application 17/940,231, filed Sept. 9, 2022.

  2. K. Mori, H. Sirringhaus, K. K. Banger, R. L. Peterson, “Oxide Semiconductor,” International Patent Application PCT/GB/2009/0013037 and US Patent Application 13/265254, filed April 24, 2009. US Publication number 20120037901 A1, Feb. 16, 2012. 

  3. K. Najafi, M. Sadeghi, R. L. Peterson, and Y. Tang, “Three-Dimensional Microelectromechanical Systems Structure,” US Patent Application 14/064098, filed October 25, 2013. Publication number 20140283604 A1, September 25, 2014.