Project
Apr. 2015 - Mar. 2020 (The Univ. of Tokyo)
On-Chip Electroosmotic Micropump Integrated with HV generator
On-Chip Electroosmotic Micropump Integrated with HV generator
95.4-V Post-Processed Deep-Trench Isolated HV generator
95.4-V Post-Processed Deep-Trench Isolated HV generator
30-V Post-Processed Deep-Trench Isolated HV switch
30-V Post-Processed Deep-Trench Isolated HV switch
Dry release of SOI MEMS and Test Structures Measurement using SF6 Isotropic Etching
Dry release of SOI MEMS and Test Structures Measurement using SF6 Isotropic Etching
Mille-Feuille Electrodes Sample-Altitude Controllable Electrorotation Device
Mille-Feuille Electrodes Sample-Altitude Controllable Electrorotation Device