Research Highlights

SPAD Device Simulation & Fabrication

TCAD Silvaco simulation

wafer cleaning

dry and wet etching

contact deposition

side wall passivation

pad metal deposition

  • Specific mesa design for performance improvement of single photon avalanche diode

  • Important figure of merits of single photon avalanche diode

Measurement

IV curve

dark count

timing jitter

photon detection efficiency

afterpulsing







  • Hanbury Brown Twiss setup for coincidence measurement

  • Photon number resolving