Equipment
AJA Magnetron Sputtering System
* 7 confocal magnetron sputtering guns allowing uniform deposition over 4" wafer and co-sputtering
* Biult-in Kaufmann ion source for ion beam etching
* In-situ mask indexing system allowing deposition of different stacks on multiple samples in one load
* Load-lock transfer
Magneto-Optic-Kerr-Effect-based Spin-Orbit Torque Meaurement System
* Electromagnet with magnetic field up to 5 KG
* Stable 785 nm Laser Power up to 100 mW
* Near 1000:1 SNR for measuring damping-like spin-orbit torque in a Py(3nm)/Pt(5nm) test sample
Probe Station with 5-axis Magnets
* 5-axis electromagnet with tunable magnetic fields in x-, y- and z- directions up to 1 kG
* Four DC probes. Currently good for measuring transport behaviors such as giant magnetoresistance, anisotropic magnetoresistance, and anomalous Hall effect.
* Can measure second harmonics to extrapolate
Magneto-thermo-electric Measurement System
* Electromagnet with magnetic field up to 10 kG
* Precise control of heat flow and temperature
* Nanovolt resolution after averaging
Ferromagnetic Resonance and Spin Pumping System
* Agilent 8720B Network analyzer (130 MHz - 20 GHz)
* Electromagnet with magnetic field up to 10 KG
* Broadband coplanar waveguide for flip-chip FMR measurement
* Varian X-band TE102 resonant cavity (Courtesy of Prof. Eaton)
* Sample holder with 3D motion stage
Photolithography System with Home-built Mask Aligner
* Uses 2" x 2" mask with writing field of about 1.5" x 1.5"
* Minimum alignment step size of 5 um.
* Can carry out both positive and negative photolithography
Lulzbot Mini 3D printer
* Quick and convenient printing 3D objects with plastics.