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Precise. Robust. Compact.
Task
Task
Premier Automation's Vacuum Chamber Robot assists in the ion-beam manufacturing process of Samsung’s microchips. In order to complete the seal, our robot needed to position the vacuum seal lid within 0.005 of an inch. Our system had to perform this task reliably for millions of cycles, and integrate seamlessly so that the microchips could be manufactured autonomously.
Vacuum Chamber Robot
Vacuum Chamber Robot
Integrated System
Integrated System
Key Design Considerations
Key Design Considerations
1. Planar Adjustability
1. Planar Adjustability
The radial difference in the upper and lower load locks was .005”. The typical tolerance for a single machined part is also ± 0.005 inches. From the robot base to our critical dimension, we had 6 machined parts, meaning our tolerance stack-up was already ± 0.03“. To increase precision we implemented adjustability (not only in X & Y but rotationally as well) near the critical dimension in order to guarantee accuracy and meet our tolerances.
2. Serviceability
2. Serviceability
The end user was in Korea. Knowing that our system would be out of reach to us and likely serviced by the end-user, we keyed mechanical interfaces and included features that make it easy to reassemble components. We also designed the system to be as modular and intuitive as possible with multiple points available for fine tuning should minor corrections ever be required.
3. Dual Verification
3. Dual Verification
Our system was designed for robustness. By checking every critical position twice through 2 independent processes, we added a layer of redundancy to our system that would flag issues before they happened. Additional mechanical hard-stops guaranteed we had a fail-safe system that protected the delicate scientific instruments we were handling throughout millions of cycles and even in potential worst-case scenarios.
4. Floating Shoulder
4. Floating Shoulder
During the sealing process for the load lock lid, an O-ring is compressed by 0.010". To account for this compression we had to design a mechanism for mechanically interlocked parts to have linear compliance in the vertical direction while still meeting the other necessary requirements.
5. Cost-Effectiveness
5. Cost-Effectiveness
There was the potential for up to 60 units. To effectively design for quantity, we wanted to optimize the manufacturing process. To do this we went through several iterations of every part to ensure they were as simple and cost-effective to manufacture as possible without losing any functionality.
6. Customer Integration
6. Customer Integration
Our system was retrofitted into our customer's product. Communication, signals, mechanical interfaces, wiring, and even aesthetics all had to seamlessly integrate into one product for the end user. We worked with our customer to make sure the each system was thoroughly tested and met both of our standards.
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Total Cost For Engineering, Components, and Install Starting at: $35,000.00
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