ALD of a range of materials, including metals, oxides, and sulfides for various applications in nanoelectronics
Understanding of ALD synthesis mechanism
Growth of multi-component materials and doped materials by ALD
High-k materials for capacitor technology
Metals and conducting oxides for 3D structured capacitor electrodes
Synthesis of 2D metal sulfides
TFTs utilizing 2D materials
2D materials-based gas sensors
High performance n-type oxide TFTs
Development of p-type oxide semiconductors
Nano-structure engineering for high figure-of-merit of Bi2Te3-related materials