Our interest is to investigate small-scale fluid problems that have not been explored. Research efforts will be dedicated to uncovering innovative research topics, and understanding how fluid systems interact, and cope with their surroundings in fundamental levels. We visualize flows to uncover governing mechanisms and translate them into applications. The below is an overview of research items that we are passionate about.
We visualize how supercritical CO₂ replaces and dries microdroplets on wettable solids. Crossing the critical point collapses interfacial tension, enabling gentle solvent exchange and drying without the capillary/Marangoni flows that cause coffee-ring deposits. We are translating these insights into ring-free deposition, residue-free cleaning, and uniform coating processes.
We visualize replacement of a liquid film inside a micropatterned substrate using high-pressure CO₂. As the free surface dries and recedes along the micropatterned surface, incomplete replacement generates asymmetric capillary stresses along the free surface that tilt the structures (pattern leaning). The observation underscores the need for complete film exchange to avoid feature deformation in semiconductor processes.