Toshio Seki's Home Page
1973, I was born in Hyogo.
April 1976, I entered Kawanisi-Tsurunosou kindergarten.
April 1979, I entered Kawanisikita primary school and belonged to the Japanese chess club.
April 1985, I entered Rokko high school and belonged to physics club.
April 1991, I entered School of Electrical and Electronic Engineering, Faculty of Engineering, Kyoto University and belonged to kyoto University Micro Computer club.
April 1995, I went on to Department of Electronic Science and Engineering, Kyoto University and belonged to Ion Beam Engineering Experimental Laboratory (Yamada Lab.).
March 23, 2000, I was conferred the degree of Doctor of Engineering, Kyoto University.
April 17, 2000, I was employed as PhD. Researcher of Ion Beam Engineering Experimental Laboratory, Kyoto University.
March 31, 2003, I retired from PhD. Researcher of Ion Beam Engineering Experimental Laboratory, Kyoto University.
April 1, 2003, I was employed as PhD. Researcher of Osaka Science & Technology Center.
May 31, 2005, I retired from PhD. Researcher of of Osaka Science & Technology Center.
June 1, 2005, I was employed as Research Associate of Quantum Science and Engineering Center, Kyoto University.
April 30, 2007, I retired from Research Associate of Quantum Science and Engineering Center, Kyoto University.
May 1, 2007, I was employed as Junior Associate Professor of Department of Nuclear Engineering, Graduate School of Engineering, Kyoto University.
I am working in Quantum Science and Engineering Center, Kyoto University.
Study
Neutral Cluster Beam Technology
2016 DPS "Oblique pattern etching with ClF3-Ar neutral cluster beam"(PDF Format 227kB)
2013 MRS-J poster "Si Etching with ClF3 Neutral Cluster Beam from Multi-nozzle"(PDF Format 316kB)
2011 MRS-J poster "Cluster Beam Generation of Low Vapor Pressure Materials"(PDF Format 279kB)
Advanced Composite Cluster Beam Technology
2009 Report "Generation of nano-scale structure controlled composite cluster beam"(PDF Format 397kB)
Development of MeV-SIMS system
2015 ISI "Imaging mass spectrometry with MeV-energy heavy ion beams"(PDF Format 3106kB)
2012 IMSC poster "Bio‐imaging with Swift Heavy Ion Beams"(PDF Format 1,352kB)
Cluster Ion Beam Process Technology
2008 Cluster Workshop "High-speed processing with Cl2 cluster ion beam"(PDF Format 153kB)
2007 Cluster Workshop "High-Speed Nano-Processing with Reactive Cluster Ion Beams"(PDF Format 189kB)
2005 Cluster Workshop "SURFACE PROCESSING WITH HIGH-ENERGY GAS CLUSTER ION BEAMS"(PDF Format 203kB)
Development of the Large Current Cluster Ion Beam Technology
Nanoscale Observation and Analysis of Damage Formation and Annealing Processes in Ion Beam Interactions with Surfaces
STM OBSERVATION OF SURFACES IRRADIATED WITH CLUSTER IONS
Study of epitaxial Al/Al2O3 multilayer structures on Si(111)
Publication
Doctoral Thesis
Awards
XIIth International Conference on Ion Implantation Technology (IIT'98), June (1998), Kyoto, Japan.
Best Student Award of Ion Implantation Conference
The 38th International Symposium on Dry Process (DPS2016), November (2016), Hokkaido, Japan.
Best Presentation Award