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Plasma Etching: An Introduction PDF

by : Dennis M. Manos

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Book Description:

Plasma etching plays an essential role in microelectronic circuit manufacturing. Suitable for researchers, process engineers, and graduate students, this book introduces the basic physics and chemistry of electrical discharges and relates them to plasma etching mechanisms. Throughout the volume the authors offer practical examples of process chemistry, equipment design, and production methods.

Book Detail:

Title: Plasma Etching: An Introduction

Author : Dennis M. Manos

Pages : 476

Publisher : Academic Press

Language :

ISBN : 0124693709