• Brand Model: FEI Inspect F

• Resolution: 1.2nm at 30kV (SE) / 3.0nm at 1kV (SE)

• Accelerating Voltage: 200V – 30kV

• The ELS-7500EX is a compact and versatile system for electron beam lithography with an array of sophisticated capabilities: high resolution, high acceleration voltage, ultra stable and accurate positioning, super fast exposure for large areas.

• Brand Model: Oxford Plasmalab System 100

• Gases: CHF₃, O₂, H₂

• Services: Si₃N₄, InP and GaAs etching

• Gas: Ar

• Beam Voltage range: 500 ~ 1200 V

• Argon ions contained within plasma formed by an electrical discharge are accelerated by a pair of optically aligned grids. Common materials include Au, Pt, Si, SiO_2... can be ion etched.

• Max. temperature: 700 ℃, supports 5~7 steps of heating variations.

• Gases: N₂、H₂

• Services:
  Direct wafer bonding : sapphire/InP、sapphire/InGaAs、sapphire/GaAs
  Annealing

• Laser source: 850nm TTL diode laser with power up to 100mW

• Analysis system:

Monochromator
Focal length: 550mm
Grating: 900 G/mm with 1550nm blaze wavelength
Detector: InGaAs solid state detector for 800~1600nm.

Optical spectrum analyzer
Detection range:600nm~1700nm
Resolution: 0.08nm
Sensitivity: -90dBm

• Laser source:

1. 532nm Q-switched pulse laser with frequency up to 2000Hz and 3.5μJ/pulse.

2. 830nm TTL laser with power up to 140mW and 6ns minimum pulse width.

• Sample types: Si , GaN, InAs QDs, GaAs QWs

• Analysis system:

Monochromator

Focal length: 300mm

Grating: 1200 G/mm with 500nm blaze wavelength (2.3nm/mm)

(optimized wavelength range from 335nm to 750nm)

Detector: Photomultiplier tube for 190-900nm integrated PMT detector

Optical spectrum analyzer

Detection range:600nm~1700nm

Resolution: 0.08nm

Sensitivity: -90dBm

Bruker Vertex 70 model Fourier-transform-infrared (FTIR) spectrometer is coupled to a Hyperion model microscope spectrometer system. The Vertex 70 and Hyperion systems have been custom configured to allow its operation from 780nm to 26.6um(ie 12800 cm^-1 to 375cm^-1) with a maximum resolution of 0.2cm^-1. The Hyperion unit includes transmission and reflection modes for its sample measurement. The Hyperion is also equipped with a video camera allowing sample viewing and sample documentation.