01_Thin-film growth
Post date: Jan. 6, 2020
Pulsed Laser Deposition (PLD)
Piezoelectric Film Fabrication System (RF Sputtering)
(1) Home Made, Max 10-5 ~ 10-6 Torr
Piezoelectric Film Fabrication System (Sol-Gel)
DC Sputtering System (Top Electrode)
(1) Cressington Sputter Coater 108, Max 10-3 Torr