Teaching

ME46020 : Micro and Nano System Design & Fabrication, including MEMS lab

This master-level course covers the basics of micro and nanofabrication techniques and the design of microactuators and sensors. Students make measurements on MEMS actuators in the lab. They work in teams to design a MEMS device according to the specifications, make analytical and numerical modeling, and draw a photolithography mask to fabricate the device.

Here are some of the devices designed by students of the course.

Microgrippers