● Plasma Simulation and Application
Pulsed Plasma Modeling
Design of Plasma Equipment and Elements
FEM, PIC Simulation
● Process Simulation and Application
Cu-Cu Direct Bonding
Area-Selective Deposition
Plasma-Surface Interaction
Multiscale Analysis (Molecular Dynamics, ab-initio, Feature-Scale)
● Plasma Experiment and Application
Pulsed-ICP with Pulsed Bias
OES, Langmuir Probe, VI Probe
Plasma Treatment of Electronic Device
Fabrication and Characterization of Electronic Device