Hi Amel


Here are a few possible causes of the discrepancies:


a. The poly fill was not exported together with the design due to bad layer mapping

=> Correct the layer map file and redo stream out


b. The poly fill was created using the wrong fill type (e.g. type "dummy" instead of type "drawing") and was not recognized by the foundry sign-off drc deck

=> Re-create the fill using the correct fill type and re-export the gds file


c. You are using a different verification tool from the foundry (e.g. you are using Assura/PVS and tsmc uses another tool)

=> Get detail information from foundry on the density errors which they have encountered


d. The density rules in your rule deck are coded differently from those in the foundry sign-off rule deck (due to different tools). E.g. your deck does not use windowing but density of each windows are checked in the sign-off rule deck

=> Get detail information from foundry on the density errors which they have encountered


e. You had run drc and gotten zero drc errors but had forgotten to enable the switch for density check

=> Enable density check and redo drc


It would be best to first clarify with the foundry on the details of the density error. : )


Best regards

Quek

Hi Amel


The stream layer map file is named as "techlib.layermap" (e.g. tsmc018.layermap) in the technology library. You can check if "Poly1 dummy" is listed as one of the layers to export. Alternatively, you can import the gds file and check if the imported layout contains poly1 dummy shapes.


I think the most important thing right now is to get detail information on the errors which your foundry is reporting. Otherwise you might not be doing the correct troubleshooting. : )


Best regards

Quek



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