Lab. Equipment
ALD equipment
Thermal ALD
(Disk-chamber)
- NCD -
Thermal ALD
(Tube-chamber)
- ITechU -
FBR-ALD
(Powder)
- Isac Research -
PEALD
(12" wafer)
- Isac Research -
Analysis equipment
4 Point Probe
Ellipsometer
Potentiostat
Single channel
Potentiostat
Multi channel
(2 channel)
Contact angle measurement
Fuel Cell test
TGA
Gas chromatography
pH meter
For synthesis
Vacuum oven
Drying oven
Dip-coater
Spin-coater