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표면소재 연구실
Home
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Research Area
Lab. Equipment
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Laboratory Life
표면소재 연구실
Home
Members
Professor
Students
Alumni
Research Fields
Research Area
Lab. Equipment
On-going Project
Publications
SCI & SCI(E) Paper
Books
Awards
Notice & News
Laboratory Life
More
Home
Members
Professor
Students
Alumni
Research Fields
Research Area
Lab. Equipment
On-going Project
Publications
SCI & SCI(E) Paper
Books
Awards
Notice & News
Laboratory Life
Lab. Equipment
12-inch
Metal
PEALD
Max T=650 'C
Isac Research
12-inch
Oxide
PEALD
Max T=
45
0 'C
Isac Research
6-inch ALD
Max T=400 'C
NCD Lucida D100
Powder ALD
Max T=
28
0 'C
Isac Research
Tube-type ALD
-
ITechU
Tube Furnace
RTA
Analysis Equipment
XRD
FE-SEM
AFM
Potentiostat (Single & Multi channel)
Fuel Cell test
Gas Chromatography
TGA
pH meter
Contact angle
Ellipsometer
4 Point Probe
Others
Vacuum oven
Drying oven
Dip coater
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