Lab. Equipment

  • ALD equipment

Thermal ALD
(Disk-chamber)
- NCD -

Thermal ALD
(Tube-chamber)
- ITechU -

FBR-ALD
(Powder)
- Isac Research -

PEALD
(12" wafer)
- Isac Research -

  • Analysis equipment

4 Point Probe

Ellipsometer

Potentiostat
Single channel

Potentiostat
Multi channel
(2 channel)

Contact angle measurement

Fuel Cell test

TGA

Gas chromatography

pH meter

  • For synthesis

Vacuum oven

Drying oven

Dip-coater

Spin-coater