Electron-Beam Evaporation (Angstrom Engineering AMOD)

• Dual electron beams for co-evaporation: 2 Telemark 6 ╳ 7cc electron beam sources
• Reactive gas: O2, N2...
• Substrate size: 6 inches, temperature: <500 °C
• Metal: Al, Si, Ti, Cr, Fe, Co, Ni, Cu, Nb, Ag, Ta, W, Au...
• Non-metal: Al2O3, SiO2, TiO2, Fe2O3, NiO, Ga2O3, SrTiO3, ZrO2, Nb2O5, In2O3, SnO2, BaO, BaF2, Ta2O5, La2O3...

Plasma-Enhanced Atomic Layer Deposition (Picosun R-200 Advanced)

• Sources: Ti, Ga, Ni, Co, Mg
• Plasma sources: O2, NH3
• Substrate size: 6 inches, temperature: <500 °C

Glovebox (Vigor)

• Proceessing gas: N2
• Solar cell fabrication and packaging
• Handling and storage of oxygen and moisture sensitive substances

Spin Coater (Laurell WS-650-23)

• Speed: 1-12000 rpm
• Substrate: ø150 mm wafers and 5" × 5" (127 mm × 127 mm) substrate
• Installed inside N2 glovebox

High Voltage Power Supply (Matsusada RK650-1.2)

• Voltage: 0-650 V
• Current: 0-1.2 A
• For anodization of Al, Ta, Nb...

Tube Furnaces (MTI & BEQ)

• Temperature: <1200 °C
• Processing gases: NH3, N2, O2, Ar...
• Equipped with vacuum pump and MFC
• RTP function available on BEQ furnace

Rotary Evaporator (Dragon LAB RE100-PRO)

• For the synthesis of perovskite precursors (MAI, MABr, FAI, FABr...)

UV Ozone Cleaner (Beijing Yanzheng)

• For substrate cleaning

Fume Hoods (Shanghai Hushi)

X-Ray Diffractometer (Thermo Scientific ARL™ EQUINOX 1000 )

Time-resolved Photoluminescence (PicoQuant FluoTime 300)

• Excitation: picosecond pulsed laser (420 nm, 510 nm)
• Detection: TCSPC (TimeHarp 260, 25 ps temperal resolution), PMT (230-920 nm)
• Temperature range: 8-350 K

PEC & PV Characterization Systems

• Consisted of the following solar simulator, potentiostat, and voltage source.

Solar Simulator (SAN-EI Electronics XES-40)

• AAA Class
• Effective irradiated area: □40mm
• AM 1.5 G, 1000 W/m2, 2000 hr lifetime
• AIST certified Reference Cell (Konica Minolta) for irradiance calibrition

Potentiostat (Bio-Logic SP-200)

• For PEC measurements: CV, LSV, CA...
• Voltage: ±10V, Current: ±10nA~500mA
• EIS: 10uHz~7MHz
• Mott-Schottky analysis

Voltage Source (Keithley 2400)

• For solar cell IV test, LabView interface
• Max. Current: 1 A
• Max. Voltage: 200 V
• Measurement resolution: 1 pA / 100 nV
• Power: 20 W