3 guns: ZnO, ITO, IZO,
6 evaporator+2 guns: Metallic films
Al2O3, SnO2
Al2O3, ZnO, SnO2, (Zn,Sn)O, etc
Perovskite solar cells
Perovskite solar cells
Nanoparticles
Nanoparticles
442 nm, 532 nm, 633 nm with mapping stage and software
80~300K
C-AFM, KPFM
350 nm ~ 1200 nm
950 nm ~ 1400 nm