Oct 2025

2025 International Conference on Planarization/CMP Technology (ICPT)

• Fundamentals of CMP chemistry (Tutorial) / Prof. Kangchun Lee

• pH-tuned approach for defect reduction during poly open CMP / Donggeun Park [★Best Student Poster Award]

• Mechanistic investigation of inhibitor mechanism in Mo CMP / Ilhwa Hong

Jul 2025

2025 Summer Annual Conference of ISE (2025 반도체공학회 하계학술대회)

(https://www.viva100.com/article/20250715500847)

• Talk title : The role of CMP in Cu hybrid bonding: Challenges and integration strategies

• Speaker : Prof. Kangchun Lee

Jun 2025

2025 KIEEME Annual Summer Conference (2025 하계 한국전기전자재료학회)

• Optimization of PAA removal through pH adjustment for improved Si3N4 surface conditioning / Donggeun Park

• Controlling molybdenum oxidation behavior through catalytic oxidation for semiconductor integration / Ilhwa Hong

• Structural dependency of metal-organic coordination adsorption by pyridine carboxylic acid isomers for optimized copper corrosion mitigation / Ganghyeok Kim

Apr 2025

2025 Spring Meeting of The Korean Ceramic Society (2025 춘계 한국세라믹학회)

• Talk title : Tailoring electrostatic attraction between chemical additive and hardmask film in GAAFET patterning

• Speaker : Donggeun Park

Aug 2024

2024 CAMP International CMP Symposium

• Talk title : Predicting corrosion inhibition efficiency based on charge transfer factor

• Speaker : Prof. Kangchun Lee

Jul 2024

ENF Technology 세미나 및 클린룸 투어

• Talk title : Design of CMP slurries in advanced logic integration

• Speaker : Prof. Kangchun Lee

May 2024

79th Korea CMPUGM Technical Meeting (79회 한국 CMPUGM)

Feb 2024

2024 SEMICON KOREA

• Talk title : Advanced corrosion mitigation strategies in CMP

• Speaker : Prof. Kangchun Lee