Scalable self-aligned fabrication of nanoscale
vertical a-IGZO TFTs utilizing angle deposition

Jiyoung Bang, Seungmin Choi, Yeonsu Lee, Yeonghun Lee, Hyowon Kim, Hyeonjeong Sun, Seungjae Lee, Yeoeun Yun,
Kyubin Hwang, Tayang Kim, Eunsuk Choi, Onejae Sul and Seung-Beck Lee, 

Nanotechnology 37 (2026) 015205

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