Fabrication and electrical characteristics of carbon nanotube-based

microcathodes for use in a parallel electron-beam lithography system 

K.B.K. Teo, G. Pirio, M. Chhowalla, P. Legagneux, S.-B. Lee, D.G. Hasko, H. Ahmed, D. Pribat, G.A.J. Amaratunga, and W.I. Milne

Journal of Vacuum Science and Technology B 21 , 693, 2003.02

[관련 사이트]