Aligned carbon nanotubes for parallel e-beam lithography applications

D. Pribat, P. Legagneux, L. Gangloff, J. Ph. Schnell, K.B.K. Teo, M. Chhowalla,

G.A.J. Amaratunga, W.I. Milne, S.-B. Lee , D.G. Hasko, H. Ahmed, V. Semet, Vu Thien Binh

Proceedings of the Electrochemical Society, 2003.