Enhanced Field Effect Mobility of a-IGZO TFTs by Varying Thickness of Ta Capping Layer

Seungmin Choi, Hyoungbeen Ju, Jiyoung Bang, Hyeonjeong Sun, Sangduk Kim, 

Yeonghun Lee, Youngsoo Noh and Seung-Beck Lee

KISM 2023, November 19, 2023, PARADISE HOTEL, (Busan)