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International Symposium on the Physics of Semiconductors and Applications(ISPSA) 2011
Detection and removal of airborne nanoparticles using kinetic and electrostatic force of paddle-type bridge MEMS sensors
Bonghyun Park , Donggeun Lee and Seung-Beck Lee
International Symposium on the Physics of Semiconductors and Applications(ISPSA) 2011 July 6, 2011, Ramada Plaza Jeju Hotel, Jeju, Korea
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