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EIPBN (Electron, Ion, and Photon Beam technology and Nanofabrication) 2012
Fabrication of On-Chip Fluidic Channels Incorporating Nanopores using Self-Aligned Double Layer Resist Processing Technique
Bongho Kim, Jihun Kwon, Daehong Kim, Sungwoo Chun, Hyungyu Lee and Seung-Beck Lee,
EIPBN 2012, June 29, 2012, Hilton Waikoloa Village, Hawaii