Self-Aligned Fabrication of Sub-50 nm Top Gate Coplanar IGZO/ITO Thin-Film Transistors without Nanoscale Patterning

 Jiyoung Bang, Yeonghun Lee, Yeonsu Lee, Minjin Kwon, Hyoungbeen Ju, Hyeonjeong Sun, Sangduk Kim, Seungmin Choi, 

Youngsoo Noh, Hyowon Kim, Eunsuk Choi and Seung-Beck Lee

2024 MRS Spring Meeting, April 24, 2024, Seattle Convention Center, Washington