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Conference
Conference
KISM 2024
Sub-50 nm Coplanar IGZO/ITO TFTs via Self-Aligned Fabrication Using Tilted Deposition
Yeoeun Yun, JiyoungBang, HyeonjeongSun,YoungsooNoh, SeungminChoi, Hyowon Kim,
Seungjae Lee, Kyubin Hwang and Seung-Beck Lee
KISM, November 12-14, 2024, PARADISE & Grand Josun HOTEL, (Busan)
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