Analysis of high-temperature annealing dependence of 7nm channel IGZO TFTs 

Hyeonjeong Sun, Hyoungbeen Ju, Jiyoung Bang, Jinsil Gong, Sehoon Oh, Yeonsu Lee, Minjin Kwon, Onejae Sul and Seung-Beck Lee 

제 29회 한국 반도체 학술대회, January 25, 2022, Seoul, Korea