27. 제 19회 반도체 학술대회

Fabrication of Sub-30nm Pillar Array by Oxygen Plasma Treatment, Bongho Kim, Daehong Kim, Sungwoo Chun, JihunKwon, Seonjun Choi and Seung-Beck Lee, 제 19회 반도체 학술대회 Feb 5, Korea University , Korea