26. 2011 한국자기학회

Resist Trimming Technique in Oxygen Plasma for Sub-30nm Pillar Array, Bongho Kim, Daehong Kim, Jihun Kwon, Sungwoo Chun, Seonjun Choiand Seung-Beck Lee, 2011 한국자기학회, Dec 5 , Ramada hotel, Jeju