We have two VTI cryostats and several inserts including He3 inserts that allow to do measurements at any temperature between 300K and 300mK. The inserts are capable of DC, RF and optical measurements. The magnets in our cryostats can go upto 14T (4.2K) and 16T (Lambda fridge). Triton Dilution fridge with DC and GHz lines with cryogenic amplifiers. In addition to this we have amplifiers and signal generators for different requirements.
VTI cryostat with He3 insert
with 14T Magnet
Cryogenic Probe stations
Glovebox
Wirebonder
Triton Dilution Fridge
Triton Dilution Fridge
VTI Cryostat with 8T magnet
Optical microscopes
TIFR has a well equipped but modest cleanroom for nanofabrication. Raith e-line is our main tool for lithography and has lots of nice features that allows us to do any kind of patterning. Our reactive ion etchers and PECVD systems are from Sentech. These ICP coupled etchers and deposition tools can generate very high density of plasma making etching materials like sapphire and deposition of high quality dielectric at low temperature possible. Our high vaccum evaporator with a cryopump has 8 pocket e-beam hearth. There are other custom features like sample rotation and in-situ plasma cleaning that come in very handy. We also have a good sputtering system that allows us to sputter dielectric and metallic samples together with in-situ etching.
Raith e-line
PECVD and RIE
ALD
Karl-Suss Aligner